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- W4378389923 abstract "Double-Ronchi shearing interferometry is widely used in wavefront aberration measurements for advanced lithography projection lens systems. A rigorous simulation model of double-Ronchi shearing interferometry on lithographic tools is the precondition for phase-shifting retrieval algorithm design and error analysis. This paper presents a rigorous simulation model of double-Ronchi shearing interferometry considering the vector nature of light. The model is accurate and can be used in the study of double-Ronchi shearing interferometry." @default.
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- W4378389923 date "2023-06-12" @default.
- W4378389923 modified "2023-09-24" @default.
- W4378389923 title "Rigorous simulation model of double-Ronchi shearing interferometry on lithographic tools" @default.
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- W4378389923 doi "https://doi.org/10.1364/ao.489083" @default.
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