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- W4378549766 abstract "In this paper, we describe several scaling challenges of SRAM consisting of FinFETs and horizontal Gate-All-Around (GAA) Nano-sheet Field-Effect-Transistors (NshFETs), especially investigations related to Design-Technology Co-Optimization (DTCO). Comb-shaped channel FETs (CombFETs), which integrates the advantages of FinFETs and NshFETs were introduced to a six-transistor (6 T) SRAM cell and the corresponding simulations were established. The results show that compared with both FinFETs and NshFETs, CombFETs have larger the effective channel width or higher current at the same footprint and larger room for improving the mobility mismatch between N/P transistors. Moreover, CombFET SRAM showed ∼55% increase in effective channel width, 15% improvement of read static noise margin, ∼25% write speed gain, 88% read speed gain or 20% decrease in the minimum operating voltage (Vmin)." @default.
- W4378549766 created "2023-05-28" @default.
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- W4378549766 date "2023-08-01" @default.
- W4378549766 modified "2023-09-27" @default.
- W4378549766 title "On the SRAM with comb-shaped nano FETs advancing to 3 nm node and beyond" @default.
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- W4378549766 doi "https://doi.org/10.1016/j.mejo.2023.105842" @default.
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