Matches in SemOpenAlex for { <https://semopenalex.org/work/W4378908078> ?p ?o ?g. }
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- W4378908078 endingPage "117" @default.
- W4378908078 startingPage "113" @default.
- W4378908078 abstract "In this paper, the effect of different post oxide deposition nitridation processes in NO on n-channel lateral MOSFETs fabricated on implanted 4H-SiC were investigated. In particular, the electrical behavior of the MOSFETs was deeply investigated not only in terms of SiO 2 /SiC interface state density and field effect mobility, but also considering the threshold voltage stability effect. The aim of this work was to explore to which extent post oxide deposition annealing in NO is beneficial for the MOS interface behavior and when their detrimental effects start to become predominant on the device performances. Here, the separation of the trapping states at the interface – either close to the conduction and valence band edges – and the near interface oxide traps are reported for the different duration of the post oxide deposition annealing. In fact, cyclic gate bias stress was employed in order to analyze the behavior of the trapping states and to correlate them with the variation of the benefits in terms of the channel mobility (that saturates at about 80 cm 2 V -1 s -1 ), and on the threshold voltage instability effect. In particular, prolonged PDAs may induce an increase of the amount of trapping states close to the valence band edge and inside the insulator of about 20% and 50 %, respectively." @default.
- W4378908078 created "2023-06-01" @default.
- W4378908078 creator A5003937299 @default.
- W4378908078 creator A5018760551 @default.
- W4378908078 creator A5029620691 @default.
- W4378908078 creator A5049003724 @default.
- W4378908078 creator A5076035278 @default.
- W4378908078 creator A5090250731 @default.
- W4378908078 creator A5092060776 @default.
- W4378908078 date "2023-05-31" @default.
- W4378908078 modified "2023-09-30" @default.
- W4378908078 title "Evolution of Interface State Density and Near Interface Oxide Traps under Controlled Nitric Oxide Annealing in SiO<sub>2</sub>/SiC Lateral MOSFETs" @default.
- W4378908078 cites W2058564794 @default.
- W4378908078 cites W2080600189 @default.
- W4378908078 cites W2091749383 @default.
- W4378908078 cites W2766796456 @default.
- W4378908078 cites W2773666359 @default.
- W4378908078 cites W3103591937 @default.
- W4378908078 cites W3158269915 @default.
- W4378908078 doi "https://doi.org/10.4028/p-17738y" @default.
- W4378908078 hasPublicationYear "2023" @default.
- W4378908078 type Work @default.
- W4378908078 citedByCount "0" @default.
- W4378908078 crossrefType "journal-article" @default.
- W4378908078 hasAuthorship W4378908078A5003937299 @default.
- W4378908078 hasAuthorship W4378908078A5018760551 @default.
- W4378908078 hasAuthorship W4378908078A5029620691 @default.
- W4378908078 hasAuthorship W4378908078A5049003724 @default.
- W4378908078 hasAuthorship W4378908078A5076035278 @default.
- W4378908078 hasAuthorship W4378908078A5090250731 @default.
- W4378908078 hasAuthorship W4378908078A5092060776 @default.
- W4378908078 hasBestOaLocation W43789080781 @default.
- W4378908078 hasConcept C113196181 @default.
- W4378908078 hasConcept C119599485 @default.
- W4378908078 hasConcept C121332964 @default.
- W4378908078 hasConcept C127413603 @default.
- W4378908078 hasConcept C159985019 @default.
- W4378908078 hasConcept C165801399 @default.
- W4378908078 hasConcept C172385210 @default.
- W4378908078 hasConcept C185592680 @default.
- W4378908078 hasConcept C18903297 @default.
- W4378908078 hasConcept C191897082 @default.
- W4378908078 hasConcept C192562407 @default.
- W4378908078 hasConcept C195370968 @default.
- W4378908078 hasConcept C2361726 @default.
- W4378908078 hasConcept C26873012 @default.
- W4378908078 hasConcept C2777855556 @default.
- W4378908078 hasConcept C2777924906 @default.
- W4378908078 hasConcept C2779851234 @default.
- W4378908078 hasConcept C43617362 @default.
- W4378908078 hasConcept C49040817 @default.
- W4378908078 hasConcept C86803240 @default.
- W4378908078 hasConceptScore W4378908078C113196181 @default.
- W4378908078 hasConceptScore W4378908078C119599485 @default.
- W4378908078 hasConceptScore W4378908078C121332964 @default.
- W4378908078 hasConceptScore W4378908078C127413603 @default.
- W4378908078 hasConceptScore W4378908078C159985019 @default.
- W4378908078 hasConceptScore W4378908078C165801399 @default.
- W4378908078 hasConceptScore W4378908078C172385210 @default.
- W4378908078 hasConceptScore W4378908078C185592680 @default.
- W4378908078 hasConceptScore W4378908078C18903297 @default.
- W4378908078 hasConceptScore W4378908078C191897082 @default.
- W4378908078 hasConceptScore W4378908078C192562407 @default.
- W4378908078 hasConceptScore W4378908078C195370968 @default.
- W4378908078 hasConceptScore W4378908078C2361726 @default.
- W4378908078 hasConceptScore W4378908078C26873012 @default.
- W4378908078 hasConceptScore W4378908078C2777855556 @default.
- W4378908078 hasConceptScore W4378908078C2777924906 @default.
- W4378908078 hasConceptScore W4378908078C2779851234 @default.
- W4378908078 hasConceptScore W4378908078C43617362 @default.
- W4378908078 hasConceptScore W4378908078C49040817 @default.
- W4378908078 hasConceptScore W4378908078C86803240 @default.
- W4378908078 hasLocation W43789080781 @default.
- W4378908078 hasOpenAccess W4378908078 @default.
- W4378908078 hasPrimaryLocation W43789080781 @default.
- W4378908078 hasRelatedWork W2000282195 @default.
- W4378908078 hasRelatedWork W2041931633 @default.
- W4378908078 hasRelatedWork W2066206832 @default.
- W4378908078 hasRelatedWork W2109860270 @default.
- W4378908078 hasRelatedWork W2122365183 @default.
- W4378908078 hasRelatedWork W2130912595 @default.
- W4378908078 hasRelatedWork W2149554966 @default.
- W4378908078 hasRelatedWork W2184458039 @default.
- W4378908078 hasRelatedWork W2744016125 @default.
- W4378908078 hasRelatedWork W2886460219 @default.
- W4378908078 hasVolume "1090" @default.
- W4378908078 isParatext "false" @default.
- W4378908078 isRetracted "false" @default.
- W4378908078 workType "article" @default.