Matches in SemOpenAlex for { <https://semopenalex.org/work/W4379229816> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W4379229816 endingPage "247" @default.
- W4379229816 startingPage "242" @default.
- W4379229816 abstract "In this work, simulation modeling of processes of the diffusion of copper ions in low-k dielectric between two neighboring copper lines is performed. It was found that an increase in the diffusion time of an ion in a material with a porosity of 30% and a pore radius of 1 nm (for the input parameters specified in the work) due to an increase in the diffusion path can be estimated at 16%. Moreover, the combined consideration of the effect of an increase in the electric field at the edges of the pores and a decrease in the diffusion activation energy leads to a decrease in the time to breakdown by 26% relatively dense material." @default.
- W4379229816 created "2023-06-04" @default.
- W4379229816 creator A5012085971 @default.
- W4379229816 creator A5084500653 @default.
- W4379229816 creator A5090085461 @default.
- W4379229816 date "2022-01-30" @default.
- W4379229816 modified "2023-09-26" @default.
- W4379229816 title "Accounting of the porosity of the material in the simulation of the time-dependent dielectric breakdown in the metallization system of integrated circuits" @default.
- W4379229816 cites W1597355861 @default.
- W4379229816 cites W1985123953 @default.
- W4379229816 cites W2009221461 @default.
- W4379229816 cites W2049428080 @default.
- W4379229816 cites W2108724101 @default.
- W4379229816 cites W2121216335 @default.
- W4379229816 cites W2397868070 @default.
- W4379229816 cites W2769825063 @default.
- W4379229816 doi "https://doi.org/10.17073/1609-3577-2021-4-242-247" @default.
- W4379229816 hasPublicationYear "2022" @default.
- W4379229816 type Work @default.
- W4379229816 citedByCount "0" @default.
- W4379229816 crossrefType "journal-article" @default.
- W4379229816 hasAuthorship W4379229816A5012085971 @default.
- W4379229816 hasAuthorship W4379229816A5084500653 @default.
- W4379229816 hasAuthorship W4379229816A5090085461 @default.
- W4379229816 hasBestOaLocation W43792298161 @default.
- W4379229816 hasConcept C121332964 @default.
- W4379229816 hasConcept C133386390 @default.
- W4379229816 hasConcept C145148216 @default.
- W4379229816 hasConcept C159985019 @default.
- W4379229816 hasConcept C178635117 @default.
- W4379229816 hasConcept C178790620 @default.
- W4379229816 hasConcept C185592680 @default.
- W4379229816 hasConcept C18762648 @default.
- W4379229816 hasConcept C191897082 @default.
- W4379229816 hasConcept C192562407 @default.
- W4379229816 hasConcept C38652104 @default.
- W4379229816 hasConcept C41008148 @default.
- W4379229816 hasConcept C49040817 @default.
- W4379229816 hasConcept C544778455 @default.
- W4379229816 hasConcept C60799052 @default.
- W4379229816 hasConcept C62520636 @default.
- W4379229816 hasConcept C6648577 @default.
- W4379229816 hasConcept C69357855 @default.
- W4379229816 hasConcept C97355855 @default.
- W4379229816 hasConceptScore W4379229816C121332964 @default.
- W4379229816 hasConceptScore W4379229816C133386390 @default.
- W4379229816 hasConceptScore W4379229816C145148216 @default.
- W4379229816 hasConceptScore W4379229816C159985019 @default.
- W4379229816 hasConceptScore W4379229816C178635117 @default.
- W4379229816 hasConceptScore W4379229816C178790620 @default.
- W4379229816 hasConceptScore W4379229816C185592680 @default.
- W4379229816 hasConceptScore W4379229816C18762648 @default.
- W4379229816 hasConceptScore W4379229816C191897082 @default.
- W4379229816 hasConceptScore W4379229816C192562407 @default.
- W4379229816 hasConceptScore W4379229816C38652104 @default.
- W4379229816 hasConceptScore W4379229816C41008148 @default.
- W4379229816 hasConceptScore W4379229816C49040817 @default.
- W4379229816 hasConceptScore W4379229816C544778455 @default.
- W4379229816 hasConceptScore W4379229816C60799052 @default.
- W4379229816 hasConceptScore W4379229816C62520636 @default.
- W4379229816 hasConceptScore W4379229816C6648577 @default.
- W4379229816 hasConceptScore W4379229816C69357855 @default.
- W4379229816 hasConceptScore W4379229816C97355855 @default.
- W4379229816 hasIssue "4" @default.
- W4379229816 hasLocation W43792298161 @default.
- W4379229816 hasOpenAccess W4379229816 @default.
- W4379229816 hasPrimaryLocation W43792298161 @default.
- W4379229816 hasRelatedWork W1992257316 @default.
- W4379229816 hasRelatedWork W1994753809 @default.
- W4379229816 hasRelatedWork W2021714583 @default.
- W4379229816 hasRelatedWork W2043673973 @default.
- W4379229816 hasRelatedWork W2075580692 @default.
- W4379229816 hasRelatedWork W2093275523 @default.
- W4379229816 hasRelatedWork W2383379936 @default.
- W4379229816 hasRelatedWork W2913390918 @default.
- W4379229816 hasRelatedWork W4280616684 @default.
- W4379229816 hasRelatedWork W4308743684 @default.
- W4379229816 hasVolume "24" @default.
- W4379229816 isParatext "false" @default.
- W4379229816 isRetracted "false" @default.
- W4379229816 workType "article" @default.