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• W4379779670 abstract "Abstract In this study, we investigated the effect of Ar/He mixing ratio in the tetrafluoromethane/perfluorocyclobutane/Ar/He gas mixture on plasma parameters, SiO 2 etching kinetics, and etching selectivity with respect to the amorphous carbon layer (ACL) mask in the inductively coupled plasma system with the low frequency (2 MHz) bias source. It was found that the type of dominant carrier gas does influence the output process characteristics through changes in both ion flux and CF x /F ratio determining the plasma polymerizing ability. In particular, He‐rich plasmas exhibited better performance with respect to the faceting of ACL mask and SiO 2 /ACL etching selectivity." @default.
• W4379779670 created "2023-06-09" @default.
• W4379779670 creator A5004435463 @default.
• W4379779670 creator A5019313133 @default.
• W4379779670 creator A5046574035 @default.
• W4379779670 creator A5087456842 @default.
• W4379779670 date "2023-06-08" @default.
• W4379779670 modified "2023-10-17" @default.
• W4379779670 title "Noble gas effect on ACL etching selectivity to SiO₂ films" @default.
• W4379779670 cites W1495210481 @default.
• W4379779670 cites W1969852806 @default.
• W4379779670 cites W1978117068 @default.
• W4379779670 cites W1982794934 @default.
• W4379779670 cites W1997256396 @default.
• W4379779670 cites W2009458049 @default.
• W4379779670 cites W2012679140 @default.
• W4379779670 cites W2044611744 @default.
• W4379779670 cites W2055073125 @default.
• W4379779670 cites W2056889600 @default.
• W4379779670 cites W2062824111 @default.
• W4379779670 cites W2065532455 @default.
• W4379779670 cites W2077366984 @default.
• W4379779670 cites W2085458616 @default.
• W4379779670 cites W2088710695 @default.
• W4379779670 cites W2117463812 @default.
• W4379779670 cites W2226648402 @default.
• W4379779670 cites W2398772728 @default.
• W4379779670 cites W2582836014 @default.
• W4379779670 cites W2600106934 @default.
• W4379779670 cites W2791605188 @default.
• W4379779670 cites W3124386336 @default.
• W4379779670 cites W3138194785 @default.
• W4379779670 cites W3140334720 @default.
• W4379779670 cites W3154367116 @default.
• W4379779670 cites W3163601241 @default.
• W4379779670 cites W4297399417 @default.
• W4379779670 cites W4309915879 @default.
• W4379779670 cites W4313490691 @default.
• W4379779670 cites W575334471 @default.
• W4379779670 doi "https://doi.org/10.1002/ppap.202300026" @default.
• W4379779670 hasPublicationYear "2023" @default.
• W4379779670 type Work @default.
• W4379779670 citedByCount "0" @default.
• W4379779670 crossrefType "journal-article" @default.
• W4379779670 hasAuthorship W4379779670A5004435463 @default.
• W4379779670 hasAuthorship W4379779670A5019313133 @default.
• W4379779670 hasAuthorship W4379779670A5046574035 @default.
• W4379779670 hasAuthorship W4379779670A5087456842 @default.
• W4379779670 hasBestOaLocation W43797796701 @default.
• W4379779670 hasConcept C100460472 @default.
• W4379779670 hasConcept C107187091 @default.
• W4379779670 hasConcept C113196181 @default.
• W4379779670 hasConcept C113231013 @default.
• W4379779670 hasConcept C118792377 @default.
• W4379779670 hasConcept C121332964 @default.
• W4379779670 hasConcept C1291036 @default.
• W4379779670 hasConcept C130472188 @default.
• W4379779670 hasConcept C161790260 @default.
• W4379779670 hasConcept C171250308 @default.
• W4379779670 hasConcept C185592680 @default.
• W4379779670 hasConcept C192562407 @default.
• W4379779670 hasConcept C2779227376 @default.
• W4379779670 hasConcept C43617362 @default.
• W4379779670 hasConcept C55493867 @default.
• W4379779670 hasConcept C62520636 @default.
• W4379779670 hasConcept C8010536 @default.
• W4379779670 hasConcept C82706917 @default.
• W4379779670 hasConcept C95974651 @default.
• W4379779670 hasConceptScore W4379779670C100460472 @default.
• W4379779670 hasConceptScore W4379779670C107187091 @default.
• W4379779670 hasConceptScore W4379779670C113196181 @default.
• W4379779670 hasConceptScore W4379779670C113231013 @default.
• W4379779670 hasConceptScore W4379779670C118792377 @default.
• W4379779670 hasConceptScore W4379779670C121332964 @default.
• W4379779670 hasConceptScore W4379779670C1291036 @default.
• W4379779670 hasConceptScore W4379779670C130472188 @default.
• W4379779670 hasConceptScore W4379779670C161790260 @default.
• W4379779670 hasConceptScore W4379779670C171250308 @default.
• W4379779670 hasConceptScore W4379779670C185592680 @default.
• W4379779670 hasConceptScore W4379779670C192562407 @default.
• W4379779670 hasConceptScore W4379779670C2779227376 @default.
• W4379779670 hasConceptScore W4379779670C43617362 @default.
• W4379779670 hasConceptScore W4379779670C55493867 @default.
• W4379779670 hasConceptScore W4379779670C62520636 @default.
• W4379779670 hasConceptScore W4379779670C8010536 @default.
• W4379779670 hasConceptScore W4379779670C82706917 @default.
• W4379779670 hasConceptScore W4379779670C95974651 @default.
• W4379779670 hasFunder F4320335199 @default.
• W4379779670 hasIssue "8" @default.
• W4379779670 hasLocation W43797796701 @default.
• W4379779670 hasOpenAccess W4379779670 @default.
• W4379779670 hasPrimaryLocation W43797796701 @default.
• W4379779670 hasRelatedWork W2011001474 @default.
• W4379779670 hasRelatedWork W2035159056 @default.
• W4379779670 hasRelatedWork W2045553774 @default.
• W4379779670 hasRelatedWork W2086165354 @default.
• W4379779670 hasRelatedWork W2089438580 @default.
• W4379779670 hasRelatedWork W2093631838 @default.
• W4379779670 hasRelatedWork W2288145299 @default.
• W4379779670 hasRelatedWork W2765886561 @default.

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