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- W4380520320 abstract "How to improve the quality factor (Q) of transversely excited bulk wave resonators (XBARs) has become a key technical problem in the RF field. In this study, a XBAR with <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$2 ~mu text{m}$ </tex-math></inline-formula> gap-width reflector based on LiNbO3 was fabricated to attain <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${Q}_{p}$ </tex-math></inline-formula> value of 1211, exceeding the measurement in typical XABR ( <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${Q}_{p}$ </tex-math></inline-formula> = 372). Simulation results indicate that the capacity of reflector gap width to inhibit the propagation of longitudinal wave energy increases first and then decreases as gap width increases from <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$0.5 ~mu text{m}$ </tex-math></inline-formula> to <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$8 ~mu text{m}$ </tex-math></inline-formula> . The measurement results obtained from XBAR with <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$2 ~mu text{m}$ </tex-math></inline-formula> gap-width reflectors and XBAR with <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$4 ~mu text{m}$ </tex-math></inline-formula> gap-width reflectors ( <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${Q}_{p}$ </tex-math></inline-formula> = 802) demonstrate excellent consistency with the simulation results. This study presents the XBAR with largest <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${Q}_{p} times {K}_{text {eff}}^{{2}}$ </tex-math></inline-formula> (237.4) currently, which highlights the significant potential of utilizing smaller gap-width reflectors in XBARs to construct filters with large bandwidth and high frequency." @default.
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- W4380520320 date "2023-08-01" @default.
- W4380520320 modified "2023-09-24" @default.
- W4380520320 title "Study of High-Q Laterally Excited Bulk Wave Resonator With Smaller Gap-Width Reflectors" @default.
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- W4380520320 doi "https://doi.org/10.1109/led.2023.3285813" @default.
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