Matches in SemOpenAlex for { <https://semopenalex.org/work/W4380576322> ?p ?o ?g. }
- W4380576322 abstract "In this work, block copolymer lithography and ultralow energy ion implantation are combined to obtain nanovolumes with high concentrations of phosphorus atoms periodically disposed over a macroscopic area in a p-type silicon substrate. The high dose of implanted dopants grants a local amorphization of the silicon substrate. In this condition, phosphorus is activated by solid phase epitaxial regrowth (SPER) of the implanted region with a relatively low temperature thermal treatment preventing diffusion of phosphorus atoms and preserving their spatial localization. Surface morphology of the sample (AFM, SEM), crystallinity of the silicon substrate (UV Raman), and position of the phosphorus atoms (STEM- EDX, ToF-SIMS) are monitored during the process. Electrostatic potential (KPFM) and the conductivity (C-AFM) maps of the sample surface upon dopant activation are compatible with simulated I-V characteristics, suggesting the presence of an array of not ideal but working p-n nanojunctions. The proposed approach paves the way for further investigations on the possibility to modulate the dopant distribution within a silicon substrate at the nanoscale by changing the characteristic dimension of the self-assembled BCP film." @default.
- W4380576322 created "2023-06-15" @default.
- W4380576322 creator A5001412200 @default.
- W4380576322 creator A5002059995 @default.
- W4380576322 creator A5014958430 @default.
- W4380576322 creator A5017990740 @default.
- W4380576322 creator A5019661342 @default.
- W4380576322 creator A5022595157 @default.
- W4380576322 creator A5024776165 @default.
- W4380576322 creator A5054362783 @default.
- W4380576322 creator A5063391155 @default.
- W4380576322 creator A5071804973 @default.
- W4380576322 creator A5085238006 @default.
- W4380576322 date "2023-06-14" @default.
- W4380576322 modified "2023-09-30" @default.
- W4380576322 title "Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film" @default.
- W4380576322 cites W1218863303 @default.
- W4380576322 cites W1847833302 @default.
- W4380576322 cites W1960654757 @default.
- W4380576322 cites W1967144524 @default.
- W4380576322 cites W1967279041 @default.
- W4380576322 cites W1974447468 @default.
- W4380576322 cites W1985633457 @default.
- W4380576322 cites W1994542131 @default.
- W4380576322 cites W2006132853 @default.
- W4380576322 cites W2014557892 @default.
- W4380576322 cites W2020585485 @default.
- W4380576322 cites W2022315563 @default.
- W4380576322 cites W2025326903 @default.
- W4380576322 cites W2028961692 @default.
- W4380576322 cites W2029006633 @default.
- W4380576322 cites W2032735794 @default.
- W4380576322 cites W2040435757 @default.
- W4380576322 cites W2043104351 @default.
- W4380576322 cites W2047550087 @default.
- W4380576322 cites W2060220696 @default.
- W4380576322 cites W2061798607 @default.
- W4380576322 cites W2068207859 @default.
- W4380576322 cites W2072187870 @default.
- W4380576322 cites W2076039288 @default.
- W4380576322 cites W2087504974 @default.
- W4380576322 cites W2091464512 @default.
- W4380576322 cites W2095480718 @default.
- W4380576322 cites W2126297552 @default.
- W4380576322 cites W2143024328 @default.
- W4380576322 cites W2156436253 @default.
- W4380576322 cites W2190752743 @default.
- W4380576322 cites W2234429757 @default.
- W4380576322 cites W2296179342 @default.
- W4380576322 cites W2305749263 @default.
- W4380576322 cites W2313490115 @default.
- W4380576322 cites W2313884126 @default.
- W4380576322 cites W2321696708 @default.
- W4380576322 cites W2323524078 @default.
- W4380576322 cites W2395170698 @default.
- W4380576322 cites W2509595238 @default.
- W4380576322 cites W2525049455 @default.
- W4380576322 cites W2559170451 @default.
- W4380576322 cites W2564006696 @default.
- W4380576322 cites W2589010847 @default.
- W4380576322 cites W2896361913 @default.
- W4380576322 cites W2896522109 @default.
- W4380576322 cites W2896924240 @default.
- W4380576322 cites W2899433821 @default.
- W4380576322 cites W2902181786 @default.
- W4380576322 cites W2902337176 @default.
- W4380576322 cites W2911256224 @default.
- W4380576322 cites W3031609252 @default.
- W4380576322 cites W3044553787 @default.
- W4380576322 cites W3118518162 @default.
- W4380576322 cites W3135322230 @default.
- W4380576322 cites W4206241055 @default.
- W4380576322 cites W4212807117 @default.
- W4380576322 cites W4214627422 @default.
- W4380576322 cites W4233417203 @default.
- W4380576322 cites W4283811218 @default.
- W4380576322 cites W4288058030 @default.
- W4380576322 cites W4308770723 @default.
- W4380576322 cites W636099503 @default.
- W4380576322 cites W2761106828 @default.
- W4380576322 doi "https://doi.org/10.1021/acsami.3c03782" @default.
- W4380576322 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/37314734" @default.
- W4380576322 hasPublicationYear "2023" @default.
- W4380576322 type Work @default.
- W4380576322 citedByCount "0" @default.
- W4380576322 crossrefType "journal-article" @default.
- W4380576322 hasAuthorship W4380576322A5001412200 @default.
- W4380576322 hasAuthorship W4380576322A5002059995 @default.
- W4380576322 hasAuthorship W4380576322A5014958430 @default.
- W4380576322 hasAuthorship W4380576322A5017990740 @default.
- W4380576322 hasAuthorship W4380576322A5019661342 @default.
- W4380576322 hasAuthorship W4380576322A5022595157 @default.
- W4380576322 hasAuthorship W4380576322A5024776165 @default.
- W4380576322 hasAuthorship W4380576322A5054362783 @default.
- W4380576322 hasAuthorship W4380576322A5063391155 @default.
- W4380576322 hasAuthorship W4380576322A5071804973 @default.
- W4380576322 hasAuthorship W4380576322A5085238006 @default.
- W4380576322 hasBestOaLocation W43805763221 @default.
- W4380576322 hasConcept C110738630 @default.
- W4380576322 hasConcept C111368507 @default.