Matches in SemOpenAlex for { <https://semopenalex.org/work/W4380929348> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W4380929348 endingPage "107682" @default.
- W4380929348 startingPage "107682" @default.
- W4380929348 abstract "We investigated the impact of SiO2 capping layers with a thickness of 70 nm, deposited through plasma-enhanced chemical vapor deposition, on the crystalline quality and electrical properties of 300-nm-thick, solid-phase crystallized Ge thin films on SiO2/Si substrates. After the solid-phase crystallization at temperatures ranging from 425 to 500 °C, Ge thin films with SiO2 capping layers showed a faster crystallization rate, larger grains, and reduced energy barriers at grain boundaries compared to uncapped Ge films, resulting in enhanced carrier mobility. The Raman spectra and X-ray diffraction measurements suggested that the compressive stress in Ge thin films sandwiched with SiO2 layers is responsible for these enhancements. These findings demonstrate the substantial influence of SiO2 capping layers on the solid-phase-crystallized Ge thin films, which has far-reaching implications for the use of Ge-based materials in various technological applications." @default.
- W4380929348 created "2023-06-17" @default.
- W4380929348 creator A5005382488 @default.
- W4380929348 creator A5012183438 @default.
- W4380929348 creator A5020274111 @default.
- W4380929348 creator A5033421100 @default.
- W4380929348 creator A5073755121 @default.
- W4380929348 date "2023-10-01" @default.
- W4380929348 modified "2023-10-18" @default.
- W4380929348 title "Effect of SiO2 capping on the solid-phase-crystallized Ge thin films" @default.
- W4380929348 cites W1639128370 @default.
- W4380929348 cites W1971355441 @default.
- W4380929348 cites W1976927697 @default.
- W4380929348 cites W1982752018 @default.
- W4380929348 cites W2000009177 @default.
- W4380929348 cites W2015177706 @default.
- W4380929348 cites W2023446069 @default.
- W4380929348 cites W2026341999 @default.
- W4380929348 cites W2032634683 @default.
- W4380929348 cites W2037157121 @default.
- W4380929348 cites W2045436623 @default.
- W4380929348 cites W2080240036 @default.
- W4380929348 cites W2116840427 @default.
- W4380929348 cites W2157349103 @default.
- W4380929348 cites W2560490973 @default.
- W4380929348 cites W2769439556 @default.
- W4380929348 cites W2945589843 @default.
- W4380929348 cites W2985830373 @default.
- W4380929348 cites W3155985779 @default.
- W4380929348 cites W4200575515 @default.
- W4380929348 doi "https://doi.org/10.1016/j.mssp.2023.107682" @default.
- W4380929348 hasPublicationYear "2023" @default.
- W4380929348 type Work @default.
- W4380929348 citedByCount "0" @default.
- W4380929348 crossrefType "journal-article" @default.
- W4380929348 hasAuthorship W4380929348A5005382488 @default.
- W4380929348 hasAuthorship W4380929348A5012183438 @default.
- W4380929348 hasAuthorship W4380929348A5020274111 @default.
- W4380929348 hasAuthorship W4380929348A5033421100 @default.
- W4380929348 hasAuthorship W4380929348A5073755121 @default.
- W4380929348 hasConcept C120665830 @default.
- W4380929348 hasConcept C121332964 @default.
- W4380929348 hasConcept C127413603 @default.
- W4380929348 hasConcept C138999460 @default.
- W4380929348 hasConcept C171250308 @default.
- W4380929348 hasConcept C178790620 @default.
- W4380929348 hasConcept C185592680 @default.
- W4380929348 hasConcept C19067145 @default.
- W4380929348 hasConcept C191897082 @default.
- W4380929348 hasConcept C192562407 @default.
- W4380929348 hasConcept C203036418 @default.
- W4380929348 hasConcept C207114421 @default.
- W4380929348 hasConcept C40003534 @default.
- W4380929348 hasConcept C42360764 @default.
- W4380929348 hasConcept C44280652 @default.
- W4380929348 hasConcept C57410435 @default.
- W4380929348 hasConceptScore W4380929348C120665830 @default.
- W4380929348 hasConceptScore W4380929348C121332964 @default.
- W4380929348 hasConceptScore W4380929348C127413603 @default.
- W4380929348 hasConceptScore W4380929348C138999460 @default.
- W4380929348 hasConceptScore W4380929348C171250308 @default.
- W4380929348 hasConceptScore W4380929348C178790620 @default.
- W4380929348 hasConceptScore W4380929348C185592680 @default.
- W4380929348 hasConceptScore W4380929348C19067145 @default.
- W4380929348 hasConceptScore W4380929348C191897082 @default.
- W4380929348 hasConceptScore W4380929348C192562407 @default.
- W4380929348 hasConceptScore W4380929348C203036418 @default.
- W4380929348 hasConceptScore W4380929348C207114421 @default.
- W4380929348 hasConceptScore W4380929348C40003534 @default.
- W4380929348 hasConceptScore W4380929348C42360764 @default.
- W4380929348 hasConceptScore W4380929348C44280652 @default.
- W4380929348 hasConceptScore W4380929348C57410435 @default.
- W4380929348 hasLocation W43809293481 @default.
- W4380929348 hasOpenAccess W4380929348 @default.
- W4380929348 hasPrimaryLocation W43809293481 @default.
- W4380929348 hasRelatedWork W1985523532 @default.
- W4380929348 hasRelatedWork W1995653424 @default.
- W4380929348 hasRelatedWork W2067325978 @default.
- W4380929348 hasRelatedWork W2076611686 @default.
- W4380929348 hasRelatedWork W2080495597 @default.
- W4380929348 hasRelatedWork W2155107721 @default.
- W4380929348 hasRelatedWork W2389595501 @default.
- W4380929348 hasRelatedWork W2920640456 @default.
- W4380929348 hasRelatedWork W4235912213 @default.
- W4380929348 hasRelatedWork W840695642 @default.
- W4380929348 hasVolume "165" @default.
- W4380929348 isParatext "false" @default.
- W4380929348 isRetracted "false" @default.
- W4380929348 workType "article" @default.