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• W4381486275 endingPage "085011" @default.
• W4381486275 startingPage "085011" @default.
• W4381486275 abstract "Abstract The semiconductor metal oxide gas sensors are getting high attention owing to their high sensitivities and fast responses. They require high temperature for the reaction with target gases, and suspended silicon membrane microheaters are typically used to reduce the heating power consumption. However, they have low durability for long-term uses, and high probability of fracture by thermal stress or mechanical impact. In this study, as an alternative to the silicon membrane microheater, anodic aluminum oxide (AAO)-based microheater platform gas sensor was fabricated for low power consumption and high thermal/mechanical stabilities. Nanoscale air gaps of the AAO substrate reduce the heat loss transferred to the substrate. Therefore, AAO-based microheater platforms do not require suspended structures sustained by very thin bridges, which dramatically enhances thermal/mechanical stabilities. The temperature of fabricated microheater platform reached to 250 °C by a heating power of 27.4 mW. The excellent thermal/mechanical stabilities of the AAO-based microheater platforms were verified by cyclic on-off and mechanical shock test. The pulsed heating operation was adopted, and it reduced the heating power consumption to 9 mW. The fabricated AAO-based gas sensors showed much higher responses to NO 2 gas compared to the SiO 2 membrane-based gas sensors." @default.
• W4381486275 created "2023-06-22" @default.
• W4381486275 creator A5006712350 @default.
• W4381486275 creator A5039912981 @default.
• W4381486275 creator A5053995401 @default.
• W4381486275 creator A5072152965 @default.
• W4381486275 creator A5076269974 @default.
• W4381486275 date "2023-07-06" @default.
• W4381486275 modified "2023-09-25" @default.
• W4381486275 title "Thermally/mechanically robust anodic aluminum oxide (AAO) microheater platform for low power chemoresistive gas sensor" @default.
• W4381486275 cites W1826090448 @default.
• W4381486275 cites W1965244917 @default.
• W4381486275 cites W1982285990 @default.
• W4381486275 cites W1983512964 @default.
• W4381486275 cites W1985775156 @default.
• W4381486275 cites W2000475903 @default.
• W4381486275 cites W2029816628 @default.
• W4381486275 cites W2049919494 @default.
• W4381486275 cites W2063881203 @default.
• W4381486275 cites W2082160837 @default.
• W4381486275 cites W2083967912 @default.
• W4381486275 cites W2192077875 @default.
• W4381486275 cites W2297444313 @default.
• W4381486275 cites W2467595579 @default.
• W4381486275 cites W2509688685 @default.
• W4381486275 cites W2517105746 @default.
• W4381486275 cites W2542113557 @default.
• W4381486275 cites W2567464332 @default.
• W4381486275 cites W2583383427 @default.
• W4381486275 cites W2610648397 @default.
• W4381486275 cites W2735261283 @default.
• W4381486275 cites W2781764043 @default.
• W4381486275 cites W2786681303 @default.
• W4381486275 cites W2799544331 @default.
• W4381486275 cites W2809831261 @default.
• W4381486275 cites W2911416510 @default.
• W4381486275 cites W2911946161 @default.
• W4381486275 cites W2921399309 @default.
• W4381486275 cites W2929482742 @default.
• W4381486275 cites W2931903439 @default.
• W4381486275 cites W2980892837 @default.
• W4381486275 cites W2982102590 @default.
• W4381486275 cites W2996111959 @default.
• W4381486275 cites W2999726232 @default.
• W4381486275 cites W3006003479 @default.
• W4381486275 cites W3016462580 @default.
• W4381486275 cites W3018779211 @default.
• W4381486275 cites W3048574166 @default.
• W4381486275 cites W3111391551 @default.
• W4381486275 cites W3120812059 @default.
• W4381486275 cites W3122337446 @default.
• W4381486275 cites W3154548562 @default.
• W4381486275 cites W3156920854 @default.
• W4381486275 cites W4205323638 @default.
• W4381486275 cites W4284882893 @default.
• W4381486275 cites W4286602880 @default.
• W4381486275 cites W4295976940 @default.
• W4381486275 cites W4311627868 @default.
• W4381486275 cites W835457007 @default.
• W4381486275 doi "https://doi.org/10.1088/1361-6439/ace05e" @default.
• W4381486275 hasPublicationYear "2023" @default.
• W4381486275 type Work @default.
• W4381486275 citedByCount "0" @default.
• W4381486275 crossrefType "journal-article" @default.
• W4381486275 hasAuthorship W4381486275A5006712350 @default.
• W4381486275 hasAuthorship W4381486275A5039912981 @default.
• W4381486275 hasAuthorship W4381486275A5053995401 @default.
• W4381486275 hasAuthorship W4381486275A5072152965 @default.
• W4381486275 hasAuthorship W4381486275A5076269974 @default.
• W4381486275 hasConcept C111368507 @default.
• W4381486275 hasConcept C127313418 @default.
• W4381486275 hasConcept C136525101 @default.
• W4381486275 hasConcept C142724271 @default.
• W4381486275 hasConcept C147789679 @default.
• W4381486275 hasConcept C159985019 @default.
• W4381486275 hasConcept C17525397 @default.
• W4381486275 hasConcept C185592680 @default.
• W4381486275 hasConcept C191897082 @default.
• W4381486275 hasConcept C192562407 @default.
• W4381486275 hasConcept C204787440 @default.
• W4381486275 hasConcept C2777289219 @default.
• W4381486275 hasConcept C2779426163 @default.
• W4381486275 hasConcept C2779851234 @default.
• W4381486275 hasConcept C49040817 @default.
• W4381486275 hasConcept C544956773 @default.
• W4381486275 hasConcept C71924100 @default.
• W4381486275 hasConcept C89395315 @default.
• W4381486275 hasConceptScore W4381486275C111368507 @default.
• W4381486275 hasConceptScore W4381486275C127313418 @default.
• W4381486275 hasConceptScore W4381486275C136525101 @default.
• W4381486275 hasConceptScore W4381486275C142724271 @default.
• W4381486275 hasConceptScore W4381486275C147789679 @default.
• W4381486275 hasConceptScore W4381486275C159985019 @default.
• W4381486275 hasConceptScore W4381486275C17525397 @default.
• W4381486275 hasConceptScore W4381486275C185592680 @default.
• W4381486275 hasConceptScore W4381486275C191897082 @default.
• W4381486275 hasConceptScore W4381486275C192562407 @default.
• W4381486275 hasConceptScore W4381486275C204787440 @default.

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