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• W4381569440 endingPage "64" @default.
• W4381569440 startingPage "57" @default.
• W4381569440 abstract "In all implantations into crystalline targets, quite a few ions find a path along a crystal channel or plane, so called channeling, and these ions travel deep into the crystal. This paper treats aluminum (Al) implantation in 4H-SiC and show how the crystal lattice will guide incoming ions deep into the target and modify the final dopant distribution. 4H-SiC samples have been implanted with 100 keV Al-ions, in a “random” direction using the wafer miscut angle of 4°, as well as with the impact beam aligned anti-parallel to the [0001] direction. Aluminium concentration versus depth profiles has been recorded by secondary ion mass spectrometry (SIMS). To track the most probable ion paths during stopping process, SIIMPL, a Monte Carlo simulation code based on the binary collision approximation (MC-BCA) has been used. In addition, the remaining ion energy has been extracted from SIIMPL at various depth along the ion path. Our results show that, independent of the used impact angle, some ions will be steered by crystal planes predominantly into the direction and also along the six directions. The energy loss is smaller along these low index axes. Therefore, at a depth of 1.2 μm, some Al ions along a path may still have kinetic energy, more than 40% of the original 100 keV, and continues to move deep into the SiC sample. The mean projected range of 100 keV ions in 4H-SiC is about 120 nm." @default.
• W4381569440 created "2023-06-22" @default.
• W4381569440 creator A5050457499 @default.
• W4381569440 creator A5068004534 @default.
• W4381569440 creator A5079812175 @default.
• W4381569440 date "2023-05-30" @default.
• W4381569440 modified "2023-10-17" @default.
• W4381569440 title "Al Implantation in Sic; Where Will the Ions Come to Rest?" @default.
• W4381569440 cites W1964323388 @default.
• W4381569440 cites W2021927974 @default.
• W4381569440 cites W2024172140 @default.
• W4381569440 cites W2032573122 @default.
• W4381569440 cites W2051795407 @default.
• W4381569440 cites W2055447658 @default.
• W4381569440 cites W2090368859 @default.
• W4381569440 cites W2092904283 @default.
• W4381569440 cites W2210695287 @default.
• W4381569440 cites W2396539822 @default.
• W4381569440 cites W2564594758 @default.
• W4381569440 cites W2915379058 @default.
• W4381569440 cites W2963191505 @default.
• W4381569440 cites W2963223686 @default.
• W4381569440 cites W2963588654 @default.
• W4381569440 cites W2972108734 @default.
• W4381569440 cites W3195287093 @default.
• W4381569440 cites W4253056353 @default.
• W4381569440 doi "https://doi.org/10.4028/p-nxe4cz" @default.
• W4381569440 hasPublicationYear "2023" @default.
• W4381569440 type Work @default.
• W4381569440 citedByCount "0" @default.
• W4381569440 crossrefType "journal-article" @default.
• W4381569440 hasAuthorship W4381569440A5050457499 @default.
• W4381569440 hasAuthorship W4381569440A5068004534 @default.
• W4381569440 hasAuthorship W4381569440A5079812175 @default.
• W4381569440 hasBestOaLocation W43815694401 @default.
• W4381569440 hasConcept C105795698 @default.
• W4381569440 hasConcept C120665830 @default.
• W4381569440 hasConcept C121332964 @default.
• W4381569440 hasConcept C135889238 @default.
• W4381569440 hasConcept C145148216 @default.
• W4381569440 hasConcept C159985019 @default.
• W4381569440 hasConcept C160671074 @default.
• W4381569440 hasConcept C168986899 @default.
• W4381569440 hasConcept C171250308 @default.
• W4381569440 hasConcept C184779094 @default.
• W4381569440 hasConcept C19067145 @default.
• W4381569440 hasConcept C191486275 @default.
• W4381569440 hasConcept C191897082 @default.
• W4381569440 hasConcept C192562407 @default.
• W4381569440 hasConcept C19499675 @default.
• W4381569440 hasConcept C199360897 @default.
• W4381569440 hasConcept C204323151 @default.
• W4381569440 hasConcept C22423302 @default.
• W4381569440 hasConcept C2781285689 @default.
• W4381569440 hasConcept C33923547 @default.
• W4381569440 hasConcept C41008148 @default.
• W4381569440 hasConcept C41823505 @default.
• W4381569440 hasConcept C41999313 @default.
• W4381569440 hasConcept C49040817 @default.
• W4381569440 hasConcept C50774322 @default.
• W4381569440 hasConcept C513153333 @default.
• W4381569440 hasConcept C57160762 @default.
• W4381569440 hasConcept C62520636 @default.
• W4381569440 hasConcept C71085134 @default.
• W4381569440 hasConceptScore W4381569440C105795698 @default.
• W4381569440 hasConceptScore W4381569440C120665830 @default.
• W4381569440 hasConceptScore W4381569440C121332964 @default.
• W4381569440 hasConceptScore W4381569440C135889238 @default.
• W4381569440 hasConceptScore W4381569440C145148216 @default.
• W4381569440 hasConceptScore W4381569440C159985019 @default.
• W4381569440 hasConceptScore W4381569440C160671074 @default.
• W4381569440 hasConceptScore W4381569440C168986899 @default.
• W4381569440 hasConceptScore W4381569440C171250308 @default.
• W4381569440 hasConceptScore W4381569440C184779094 @default.
• W4381569440 hasConceptScore W4381569440C19067145 @default.
• W4381569440 hasConceptScore W4381569440C191486275 @default.
• W4381569440 hasConceptScore W4381569440C191897082 @default.
• W4381569440 hasConceptScore W4381569440C192562407 @default.
• W4381569440 hasConceptScore W4381569440C19499675 @default.
• W4381569440 hasConceptScore W4381569440C199360897 @default.
• W4381569440 hasConceptScore W4381569440C204323151 @default.
• W4381569440 hasConceptScore W4381569440C22423302 @default.
• W4381569440 hasConceptScore W4381569440C2781285689 @default.
• W4381569440 hasConceptScore W4381569440C33923547 @default.
• W4381569440 hasConceptScore W4381569440C41008148 @default.
• W4381569440 hasConceptScore W4381569440C41823505 @default.
• W4381569440 hasConceptScore W4381569440C41999313 @default.
• W4381569440 hasConceptScore W4381569440C49040817 @default.
• W4381569440 hasConceptScore W4381569440C50774322 @default.
• W4381569440 hasConceptScore W4381569440C513153333 @default.
• W4381569440 hasConceptScore W4381569440C57160762 @default.
• W4381569440 hasConceptScore W4381569440C62520636 @default.
• W4381569440 hasConceptScore W4381569440C71085134 @default.
• W4381569440 hasLocation W43815694401 @default.
• W4381569440 hasOpenAccess W4381569440 @default.
• W4381569440 hasPrimaryLocation W43815694401 @default.
• W4381569440 hasRelatedWork W1989878246 @default.
• W4381569440 hasRelatedWork W2033045680 @default.

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