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- W4382982934 abstract "This chapter introduces the readers to the oxidation process focusing on silicon. It establishes the importance of oxidation in a silicon process and discusses the thermal oxidation process and its growth mechanism in depth. Towards the end, a detailed discussion on the oxide film characterization and its properties is provided. After reading this chapter, the readers are expected to have a sound knowledge of the oxidation process as a whole and its significance in the silicon processing industry." @default.
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- W4382982934 date "2023-06-26" @default.
- W4382982934 modified "2023-09-25" @default.
- W4382982934 title "Oxidation" @default.
- W4382982934 doi "https://doi.org/10.2174/9789815079876123010009" @default.
- W4382982934 hasPublicationYear "2023" @default.
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