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• W4383374715 abstract "Ga2O3 films were deposited on (100) MgAl2O4 spinel substrates at 550, 650, 750, and 850 °C using metal-organic chemical vapor deposition and investigated using x-ray diffraction and transmission electron microscopy. A phase-pure γ-Ga2O3-based material having an inverse spinel structure was formed at 850 °C; a mixture of the γ-phase and β-Ga2O3 was detected in films grown at 750 °C. Only β-Ga2O3 was determined in the films deposited at 650 and 550 °C. A β- to γ-phase transition occurred from the substrate/film interface during growth at 750 °C. The growth and stabilization of the γ-phase at the outset of film growth at 850 °C was affected by the substantial Mg and Al chemical interdiffusion from the MgAl2O4 substrate observed in the energy-dispersive x-ray spectrum. Atomic-scale investigations via scanning transmission electron microscopy of the films grown at 750 and 850 °C revealed a strong tetrahedral site preference for Ga and an octahedral site preference for Mg and Al. It is postulated that the occupation of these atoms in these particular sites drives the β-Ga2O3 to γ-phase transition and markedly enhances the thermal stability of the latter phase at elevated temperatures." @default.
• W4383374715 created "2023-07-07" @default.
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• W4383374715 date "2023-07-03" @default.
• W4383374715 modified "2023-10-12" @default.
• W4383374715 title "Mg and Al-induced phase transformation and stabilization of Ga2O3-based <b> <i>γ</i> </b>-phase spinels" @default.
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• W4383374715 doi "https://doi.org/10.1063/5.0145076" @default.
• W4383374715 hasPublicationYear "2023" @default.
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