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- W4384009235 abstract "Alternative approaches for doping of silicon have been the subject of an intense research activity to overcome the limitations of conventional doping techniques when applied to non-planar devices [1–4]. Recently, polymers terminated with a dopant containing moiety have been proposed as a viable solution for the doping of the new evolving 3D nanostructures [5]. The self-limiting nature of the grafting process of these molecules onto not deglazed Si surfaces has been widely investigated over the past few years, demonstrating the possibility to effectively control the concentration of P atoms on the sample surface [5, 6]. Additionally, high activation rate values (η <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>a</inf> > 80%) were reported for this specific system upon drive-in of P atoms by conventional thermal treatments at high temperature in a standard RTP machine [7]. In this work, the possibility to combine this alternative doping technology with pulsed laser melting (PLM) is investigated, demonstrating the effective capability to form abrupt phosphorus junctions in silicon substrates." @default.
- W4384009235 created "2023-07-13" @default.
- W4384009235 creator A5022595157 @default.
- W4384009235 creator A5024776165 @default.
- W4384009235 creator A5054362783 @default.
- W4384009235 creator A5085500043 @default.
- W4384009235 creator A5092260079 @default.
- W4384009235 date "2023-06-08" @default.
- W4384009235 modified "2023-09-25" @default.
- W4384009235 title "Doping of silicon by phosphorus end-terminated polymers: shallow junction formation by thermal and laser annealing" @default.
- W4384009235 cites W2167243995 @default.
- W4384009235 cites W2285646612 @default.
- W4384009235 cites W2328117913 @default.
- W4384009235 cites W2773778064 @default.
- W4384009235 cites W2790431792 @default.
- W4384009235 cites W3027694028 @default.
- W4384009235 cites W3212761678 @default.
- W4384009235 cites W636099503 @default.
- W4384009235 doi "https://doi.org/10.23919/iwjt59028.2023.10175177" @default.
- W4384009235 hasPublicationYear "2023" @default.
- W4384009235 type Work @default.
- W4384009235 citedByCount "0" @default.
- W4384009235 crossrefType "proceedings-article" @default.
- W4384009235 hasAuthorship W4384009235A5022595157 @default.
- W4384009235 hasAuthorship W4384009235A5024776165 @default.
- W4384009235 hasAuthorship W4384009235A5054362783 @default.
- W4384009235 hasAuthorship W4384009235A5085500043 @default.
- W4384009235 hasAuthorship W4384009235A5092260079 @default.
- W4384009235 hasConcept C159985019 @default.
- W4384009235 hasConcept C171250308 @default.
- W4384009235 hasConcept C178790620 @default.
- W4384009235 hasConcept C185592680 @default.
- W4384009235 hasConcept C191952053 @default.
- W4384009235 hasConcept C192562407 @default.
- W4384009235 hasConcept C2776568683 @default.
- W4384009235 hasConcept C2777855556 @default.
- W4384009235 hasConcept C2780081452 @default.
- W4384009235 hasConcept C49040817 @default.
- W4384009235 hasConcept C521977710 @default.
- W4384009235 hasConcept C544956773 @default.
- W4384009235 hasConcept C57863236 @default.
- W4384009235 hasConceptScore W4384009235C159985019 @default.
- W4384009235 hasConceptScore W4384009235C171250308 @default.
- W4384009235 hasConceptScore W4384009235C178790620 @default.
- W4384009235 hasConceptScore W4384009235C185592680 @default.
- W4384009235 hasConceptScore W4384009235C191952053 @default.
- W4384009235 hasConceptScore W4384009235C192562407 @default.
- W4384009235 hasConceptScore W4384009235C2776568683 @default.
- W4384009235 hasConceptScore W4384009235C2777855556 @default.
- W4384009235 hasConceptScore W4384009235C2780081452 @default.
- W4384009235 hasConceptScore W4384009235C49040817 @default.
- W4384009235 hasConceptScore W4384009235C521977710 @default.
- W4384009235 hasConceptScore W4384009235C544956773 @default.
- W4384009235 hasConceptScore W4384009235C57863236 @default.
- W4384009235 hasLocation W43840092351 @default.
- W4384009235 hasOpenAccess W4384009235 @default.
- W4384009235 hasPrimaryLocation W43840092351 @default.
- W4384009235 hasRelatedWork W1536164958 @default.
- W4384009235 hasRelatedWork W1966205888 @default.
- W4384009235 hasRelatedWork W1968749204 @default.
- W4384009235 hasRelatedWork W1975828448 @default.
- W4384009235 hasRelatedWork W1976252060 @default.
- W4384009235 hasRelatedWork W2052759331 @default.
- W4384009235 hasRelatedWork W2083937472 @default.
- W4384009235 hasRelatedWork W2107810710 @default.
- W4384009235 hasRelatedWork W2109982910 @default.
- W4384009235 hasRelatedWork W2969264543 @default.
- W4384009235 isParatext "false" @default.
- W4384009235 isRetracted "false" @default.
- W4384009235 workType "article" @default.