FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4384934427> ?p ?o ?g. }

• W4384934427 endingPage "SM1018" @default.
• W4384934427 startingPage "SM1018" @default.
• W4384934427 abstract "Abstract The orthorhombic (O) phase formation process of Hf 0.5 Zr 0.5 O 2 (HZO) thin films on Ga 2 O 3 substrate is demonstrated. As deposited HZO thin film has the O and tetragonal (T) phases together with an amorphous phase and post-metallization annealing suppresses the crystallization into the T phase and promotes the O phase compared to annealing without a top electrode. Positive-up-negative-down measurement reveals that remanent polarization for the downwards (accumulation side) only originates from the ferroelectricity in HZO films on Ga 2 O 3 substrate. Using normal capacitance–voltage ( C–V ) measurements, a clear capacitance change from accumulation to depletion was observed. However, the C–V results also show clockwise hysteresis by charge injection from the semiconductor. High-speed C–V measurements at a voltage sweep frequency above 3 Hz show counterclockwise hysteresis, and hysteresis width saturates as the applied voltage increases. Based on these results, HZO thin films with O phase on Ga 2 O 3 substrates have ferroelectricity." @default.
• W4384934427 created "2023-07-22" @default.
• W4384934427 creator A5022310229 @default.
• W4384934427 creator A5023546922 @default.
• W4384934427 creator A5051980857 @default.
• W4384934427 creator A5080432441 @default.
• W4384934427 date "2023-08-09" @default.
• W4384934427 modified "2023-09-25" @default.
• W4384934427 title "The ferroelectric orthorhombic phase formation of Hf_0.5Zr_0.5O₂ thin films on (−201) β-Ga₂O₃ substrate by atomic layer deposition" @default.
• W4384934427 cites W1501087379 @default.
• W4384934427 cites W1625170149 @default.
• W4384934427 cites W1967256595 @default.
• W4384934427 cites W2003642693 @default.
• W4384934427 cites W2005691559 @default.
• W4384934427 cites W2025831930 @default.
• W4384934427 cites W2048881914 @default.
• W4384934427 cites W2053464171 @default.
• W4384934427 cites W2055752679 @default.
• W4384934427 cites W2070337593 @default.
• W4384934427 cites W2076972388 @default.
• W4384934427 cites W2134869306 @default.
• W4384934427 cites W2160395018 @default.
• W4384934427 cites W2164003186 @default.
• W4384934427 cites W2259626724 @default.
• W4384934427 cites W2334220755 @default.
• W4384934427 cites W2334781438 @default.
• W4384934427 cites W2416799949 @default.
• W4384934427 cites W2500525874 @default.
• W4384934427 cites W2586398571 @default.
• W4384934427 cites W2605360667 @default.
• W4384934427 cites W2618770015 @default.
• W4384934427 cites W2782924165 @default.
• W4384934427 cites W2794819725 @default.
• W4384934427 cites W2888810629 @default.
• W4384934427 cites W2890087339 @default.
• W4384934427 cites W2950865323 @default.
• W4384934427 cites W2955673450 @default.
• W4384934427 cites W2981152246 @default.
• W4384934427 cites W3003341686 @default.
• W4384934427 cites W3019664629 @default.
• W4384934427 cites W3095256020 @default.
• W4384934427 cites W3130858138 @default.
• W4384934427 cites W3136246562 @default.
• W4384934427 cites W3175719429 @default.
• W4384934427 cites W3178108539 @default.
• W4384934427 cites W3203367984 @default.
• W4384934427 cites W3208067593 @default.
• W4384934427 cites W4205796750 @default.
• W4384934427 cites W4210901099 @default.
• W4384934427 cites W4281858161 @default.
• W4384934427 cites W4284881561 @default.
• W4384934427 cites W4285392987 @default.
• W4384934427 cites W4289932425 @default.
• W4384934427 doi "https://doi.org/10.35848/1347-4065/ace917" @default.
• W4384934427 hasPublicationYear "2023" @default.
• W4384934427 type Work @default.
• W4384934427 citedByCount "0" @default.
• W4384934427 crossrefType "journal-article" @default.
• W4384934427 hasAuthorship W4384934427A5022310229 @default.
• W4384934427 hasAuthorship W4384934427A5023546922 @default.
• W4384934427 hasAuthorship W4384934427A5051980857 @default.
• W4384934427 hasAuthorship W4384934427A5080432441 @default.
• W4384934427 hasConcept C113196181 @default.
• W4384934427 hasConcept C115624301 @default.
• W4384934427 hasConcept C121332964 @default.
• W4384934427 hasConcept C123299182 @default.
• W4384934427 hasConcept C133386390 @default.
• W4384934427 hasConcept C159985019 @default.
• W4384934427 hasConcept C170751736 @default.
• W4384934427 hasConcept C171250308 @default.
• W4384934427 hasConcept C178790620 @default.
• W4384934427 hasConcept C185592680 @default.
• W4384934427 hasConcept C19067145 @default.
• W4384934427 hasConcept C192562407 @default.
• W4384934427 hasConcept C203036418 @default.
• W4384934427 hasConcept C26873012 @default.
• W4384934427 hasConcept C2777855556 @default.
• W4384934427 hasConcept C37243968 @default.
• W4384934427 hasConcept C43617362 @default.
• W4384934427 hasConcept C44280652 @default.
• W4384934427 hasConcept C49040817 @default.
• W4384934427 hasConcept C56052488 @default.
• W4384934427 hasConcept C79090758 @default.
• W4384934427 hasConcept C8010536 @default.
• W4384934427 hasConceptScore W4384934427C113196181 @default.
• W4384934427 hasConceptScore W4384934427C115624301 @default.
• W4384934427 hasConceptScore W4384934427C121332964 @default.
• W4384934427 hasConceptScore W4384934427C123299182 @default.
• W4384934427 hasConceptScore W4384934427C133386390 @default.
• W4384934427 hasConceptScore W4384934427C159985019 @default.
• W4384934427 hasConceptScore W4384934427C170751736 @default.
• W4384934427 hasConceptScore W4384934427C171250308 @default.
• W4384934427 hasConceptScore W4384934427C178790620 @default.
• W4384934427 hasConceptScore W4384934427C185592680 @default.
• W4384934427 hasConceptScore W4384934427C19067145 @default.
• W4384934427 hasConceptScore W4384934427C192562407 @default.
• W4384934427 hasConceptScore W4384934427C203036418 @default.
• W4384934427 hasConceptScore W4384934427C26873012 @default.

• next