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- W4385153850 abstract "In this paper, a planar on-silicon inductor design for electromagnetic tracking is presented. The design process has been demonstrated for a planar sensing coil in a <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>65 nm</i> on-silicon process. The designed multilayer planar inductor configuration achieves SNR of 23.6 <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>dB</i> and sensitivity of 202 μ <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>V/T/Hz</i> . The designed inductor satisfies system requirements for clinical use in electromagnetic tracking applications. The current design has been verified on the TSMC 65 <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>nm</i> process and exhibits a close correlation with simulation results. Measured SNR of 22.1 <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>dB</i> and sensitivity of 198 μ <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>V/T/Hz</i> at a frequency of 20 <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>kHz</i> and magnetic flux density of <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>150 nT</i> is achieved. An improved lumped element model to account for multi-layer planar inductor designs is also proposed." @default.
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- W4385153850 date "2023-09-15" @default.
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- W4385153850 title "Planar On-Silicon Inductor Design for Electromagnetic Tracking" @default.
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- W4385153850 doi "https://doi.org/10.1109/jsen.2023.3296471" @default.
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