FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4385399581> ?p ?o ?g. }

• W4385399581 endingPage "1524" @default.
• W4385399581 startingPage "1524" @default.
• W4385399581 abstract "Modern optical systems often require small, optically effective structures that have to be manufactured both precisely and cost-effectively. One option to do this is using nanoimprint lithography (NIL), in which the optical structures are replicated as masters using a stamping process. It would also be advantageous to manufacture the master structures quickly and easily. A master manufacturing process based on a photolithographic image of an inkjet-printed mask is presented and investigated in this paper. An essential element is that a deliberate blurring of the printed structure edge of the mask is used in the photolithographic process. Combined with the use of a non-linear photoresist, this allows for improved edge geometries of the master structure. We discuss the inkjet-printed photomask, the custom photolithography system to prevent imaging of the printing dot roughness and the manufacturing processes of NIL polymer masks as well as their subsequent stamp imprinting. Finally, it was shown that stamp geometries with a width of 1.7 µm could be realised using inkjet-printed photomasks in the master manufacturing process. This methodology opens up the potential of fast and simple master manufacturing for the development and manufacturing of optical elements." @default.
• W4385399581 created "2023-07-31" @default.
• W4385399581 creator A5001552584 @default.
• W4385399581 creator A5086001831 @default.
• W4385399581 creator A5092571375 @default.
• W4385399581 date "2023-07-29" @default.
• W4385399581 modified "2023-09-30" @default.
• W4385399581 title "Investigation of Inkjet-Printed Masks for Fast and Easy Photolithographic NIL Masters Manufacturing" @default.
• W4385399581 cites W1932391107 @default.
• W4385399581 cites W1981650779 @default.
• W4385399581 cites W2009877245 @default.
• W4385399581 cites W2015814596 @default.
• W4385399581 cites W2032330142 @default.
• W4385399581 cites W2039453925 @default.
• W4385399581 cites W2101018785 @default.
• W4385399581 cites W2103376308 @default.
• W4385399581 cites W2124919317 @default.
• W4385399581 cites W2479747134 @default.
• W4385399581 cites W2492685559 @default.
• W4385399581 cites W2606152818 @default.
• W4385399581 cites W2909485445 @default.
• W4385399581 cites W2920362558 @default.
• W4385399581 cites W2999642241 @default.
• W4385399581 cites W3093418415 @default.
• W4385399581 cites W3113402032 @default.
• W4385399581 cites W3137559137 @default.
• W4385399581 cites W3173528719 @default.
• W4385399581 cites W3190118328 @default.
• W4385399581 cites W3211782634 @default.
• W4385399581 cites W4240555628 @default.
• W4385399581 cites W4256339585 @default.
• W4385399581 cites W4318189578 @default.
• W4385399581 cites W4319067495 @default.
• W4385399581 cites W4323276366 @default.
• W4385399581 doi "https://doi.org/10.3390/mi14081524" @default.
• W4385399581 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/37630060" @default.
• W4385399581 hasPublicationYear "2023" @default.
• W4385399581 type Work @default.
• W4385399581 citedByCount "0" @default.
• W4385399581 crossrefType "journal-article" @default.
• W4385399581 hasAuthorship W4385399581A5001552584 @default.
• W4385399581 hasAuthorship W4385399581A5086001831 @default.
• W4385399581 hasAuthorship W4385399581A5092571375 @default.
• W4385399581 hasBestOaLocation W43853995811 @default.
• W4385399581 hasConcept C105487726 @default.
• W4385399581 hasConcept C134406635 @default.
• W4385399581 hasConcept C136525101 @default.
• W4385399581 hasConcept C142724271 @default.
• W4385399581 hasConcept C144444463 @default.
• W4385399581 hasConcept C14737013 @default.
• W4385399581 hasConcept C159985019 @default.
• W4385399581 hasConcept C162307627 @default.
• W4385399581 hasConcept C171250308 @default.
• W4385399581 hasConcept C191897082 @default.
• W4385399581 hasConcept C192562407 @default.
• W4385399581 hasConcept C204223013 @default.
• W4385399581 hasConcept C204787440 @default.
• W4385399581 hasConcept C2777046567 @default.
• W4385399581 hasConcept C2779227376 @default.
• W4385399581 hasConcept C41008148 @default.
• W4385399581 hasConcept C49040817 @default.
• W4385399581 hasConcept C524769229 @default.
• W4385399581 hasConcept C53524968 @default.
• W4385399581 hasConcept C71924100 @default.
• W4385399581 hasConcept C76155785 @default.
• W4385399581 hasConceptScore W4385399581C105487726 @default.
• W4385399581 hasConceptScore W4385399581C134406635 @default.
• W4385399581 hasConceptScore W4385399581C136525101 @default.
• W4385399581 hasConceptScore W4385399581C142724271 @default.
• W4385399581 hasConceptScore W4385399581C144444463 @default.
• W4385399581 hasConceptScore W4385399581C14737013 @default.
• W4385399581 hasConceptScore W4385399581C159985019 @default.
• W4385399581 hasConceptScore W4385399581C162307627 @default.
• W4385399581 hasConceptScore W4385399581C171250308 @default.
• W4385399581 hasConceptScore W4385399581C191897082 @default.
• W4385399581 hasConceptScore W4385399581C192562407 @default.
• W4385399581 hasConceptScore W4385399581C204223013 @default.
• W4385399581 hasConceptScore W4385399581C204787440 @default.
• W4385399581 hasConceptScore W4385399581C2777046567 @default.
• W4385399581 hasConceptScore W4385399581C2779227376 @default.
• W4385399581 hasConceptScore W4385399581C41008148 @default.
• W4385399581 hasConceptScore W4385399581C49040817 @default.
• W4385399581 hasConceptScore W4385399581C524769229 @default.
• W4385399581 hasConceptScore W4385399581C53524968 @default.
• W4385399581 hasConceptScore W4385399581C71924100 @default.
• W4385399581 hasConceptScore W4385399581C76155785 @default.
• W4385399581 hasIssue "8" @default.
• W4385399581 hasLocation W43853995811 @default.
• W4385399581 hasLocation W43853995812 @default.
• W4385399581 hasOpenAccess W4385399581 @default.
• W4385399581 hasPrimaryLocation W43853995811 @default.
• W4385399581 hasRelatedWork W1933867914 @default.
• W4385399581 hasRelatedWork W1973788924 @default.
• W4385399581 hasRelatedWork W2026384529 @default.
• W4385399581 hasRelatedWork W2028844463 @default.
• W4385399581 hasRelatedWork W2035441897 @default.
• W4385399581 hasRelatedWork W2080612246 @default.
• W4385399581 hasRelatedWork W4281622355 @default.

• next