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- W4385413236 abstract "Miniaturized accelerometers are in high demand for consumer electronics, acoustic monitoring, and unmanned aerial vehicles. However, there is a tradeoff between accelerometer resolution and size, which poses a major challenge. In this study, we introduce an optomechanical microelectro mechanical system (MEMS) accelerometer based on a Fabry-Perot (F-P) microcavity. The F-P microcavity consists of a fixed hemispherical mirror and a harmonic oscillator made of monocrystalline silicon. Despite its small size (only 10 mm), the MEMS accelerometer exhibits an acceleration noise floor of 40 ng/Hz$^{1/2}$ at 180 Hz, a bandwidth of 500 Hz (-3 dB), and a dynamic range of 80 dB. To suppress dominant laser intensity noise and the disturbance of temperature and pressure on the optical fiber, a balanced detection method is employed, reducing the overall noise floor from 250 ng/Hz$^{1/2}$ to 40 ng/Hz$^{1/2}$, which approaches the mechanical thermal noise limit (37 ng/Hz$^{1/2}$). These results demonstrate that the opto-mechanical coupling between the oscillator and microcavity is an excellent platform for precision measurement and opto-mechanics, benefiting from its extremely small mode volume and ability to restrain photons." @default.
- W4385413236 created "2023-08-01" @default.
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- W4385413236 date "2023-05-14" @default.
- W4385413236 modified "2023-09-23" @default.
- W4385413236 title "An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz<sup>1/2</sup>" @default.
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- W4385413236 doi "https://doi.org/10.1109/nems57332.2023.10190865" @default.
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