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- W4385559520 abstract "Ga2O3 thin films were fabricated by spray pyrolysis method using gallium acetylacetonate as source material and water as oxidizer. The films were annealed at 450°C for 60 minutes in argon atmosphere. X-ray photoelectron spectroscopy (XPS) depth profile studies were carried out to analyze the stoichiometry and composition of sprayed as-deposited and annealed Ga2O3 thin films. Surface layers and the inner layers of as-deposited and annealed films were found nearly stoichiometric." @default.
- W4385559520 created "2023-08-04" @default.
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- W4385559520 date "2023-01-01" @default.
- W4385559520 modified "2023-09-29" @default.
- W4385559520 title "XPS Depth Profile Study of Sprayed Ga<sub>2</sub>O<sub>3</sub> Thin Films" @default.
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- W4385559520 doi "https://doi.org/10.4236/eng.2023.158035" @default.
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