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- W4385830141 abstract "Abstract The impact of contact resistance ( R c ) on 1/ f noise measurements was studied to demonstrate improved accuracy with a novel three-point probe (3pp) method, introduced here, versus the typical two-point probe (2pp) arrangement. It was shown for n + -Si that using indium to lower R c decreased the noise spectral density (NSD) over 100× for 2pp. In the 3pp configuration, NSD was reduced by another ∼5×, independent of indium use (i.e. spectra overlapped), suggesting that 3pp avoids the impact of R c on NSD. More heavily doped n ++ -Si also showed improvements with 3pp and 2pp/indium versus 2pp/bare. Expectedly, 3pp provided less of a benefit relative to 2pp/indium as R c was already small due to highly degenerate doping. Measurement drift also improved with 3pp. These results have implications on 1/ f measurement accuracy for the broadly used 2pp arrangement. The 3pp method provides a better noise floor for NSD testing because it is not convoluted with signal from R c , does not require metallization and has improved simplicity and versatility yet performs equal to four-point probe methods." @default.
- W4385830141 created "2023-08-16" @default.
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- W4385830141 date "2023-08-23" @default.
- W4385830141 modified "2023-10-03" @default.
- W4385830141 title "Three-point probe 1/f noise measurement" @default.
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- W4385830141 doi "https://doi.org/10.1088/1361-6501/acf063" @default.
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