Matches in SemOpenAlex for { <https://semopenalex.org/work/W4385874144> ?p ?o ?g. }
- W4385874144 abstract "Recent advances in the growth of aluminum scandium nitride films on silicon suggest that this material platform could be applied for quantum electromechanical applications. Here, we model, fabricate, and characterize microwave frequency silicon phononic delay lines with transducers formed in an adjacent aluminum scandium nitride layer to evaluate aluminum scandium nitride films, at 32% scandium, on silicon interdigital transducers for piezoelectric transduction into suspended silicon membranes. We achieve an electromechanical coupling coefficient of 2.7% for the extensional symmetric-like Lamb mode supported in the suspended material stack and show how this coupling coefficient could be increased to at least 8.5%, which would further boost transduction efficiency and reduce the device footprint. The one-sided transduction efficiency, which quantifies the efficiency at which the source of microwave photons is converted to microwave phonons in the silicon membrane, is 10% at 5 GHz at room temperature and, as we discuss, there is a path to increase this toward near-unity efficiency based on a combination of modified device design and operation at cryogenic temperatures." @default.
- W4385874144 created "2023-08-17" @default.
- W4385874144 creator A5016419649 @default.
- W4385874144 creator A5017221061 @default.
- W4385874144 creator A5030039882 @default.
- W4385874144 creator A5031611827 @default.
- W4385874144 creator A5034827326 @default.
- W4385874144 creator A5053255201 @default.
- W4385874144 creator A5058622372 @default.
- W4385874144 creator A5063183928 @default.
- W4385874144 date "2023-08-14" @default.
- W4385874144 modified "2023-10-16" @default.
- W4385874144 title "Aluminum scandium nitride films for piezoelectric transduction into silicon at gigahertz frequencies" @default.
- W4385874144 cites W1967521884 @default.
- W4385874144 cites W1990437504 @default.
- W4385874144 cites W2003965065 @default.
- W4385874144 cites W2020215284 @default.
- W4385874144 cites W2020233211 @default.
- W4385874144 cites W2062605041 @default.
- W4385874144 cites W2072945956 @default.
- W4385874144 cites W2074383155 @default.
- W4385874144 cites W2143696282 @default.
- W4385874144 cites W2176695111 @default.
- W4385874144 cites W2256961045 @default.
- W4385874144 cites W2464730154 @default.
- W4385874144 cites W2799763652 @default.
- W4385874144 cites W2888729154 @default.
- W4385874144 cites W2949475378 @default.
- W4385874144 cites W2965513657 @default.
- W4385874144 cites W2968672929 @default.
- W4385874144 cites W2969887623 @default.
- W4385874144 cites W2972901907 @default.
- W4385874144 cites W2975131286 @default.
- W4385874144 cites W3023775345 @default.
- W4385874144 cites W3047028648 @default.
- W4385874144 cites W3092907066 @default.
- W4385874144 cites W3099966297 @default.
- W4385874144 cites W3100878689 @default.
- W4385874144 cites W3102237440 @default.
- W4385874144 cites W3104101897 @default.
- W4385874144 cites W3105353127 @default.
- W4385874144 cites W3106128141 @default.
- W4385874144 cites W3106144848 @default.
- W4385874144 cites W3113521903 @default.
- W4385874144 cites W3125594753 @default.
- W4385874144 cites W3159072330 @default.
- W4385874144 cites W3174325912 @default.
- W4385874144 cites W410782996 @default.
- W4385874144 cites W4200358553 @default.
- W4385874144 cites W4206745876 @default.
- W4385874144 cites W4282938629 @default.
- W4385874144 cites W4285130616 @default.
- W4385874144 cites W4287148373 @default.
- W4385874144 cites W4308709901 @default.
- W4385874144 doi "https://doi.org/10.1063/5.0151434" @default.
- W4385874144 hasPublicationYear "2023" @default.
- W4385874144 type Work @default.
- W4385874144 citedByCount "0" @default.
- W4385874144 crossrefType "journal-article" @default.
- W4385874144 hasAuthorship W4385874144A5016419649 @default.
- W4385874144 hasAuthorship W4385874144A5017221061 @default.
- W4385874144 hasAuthorship W4385874144A5030039882 @default.
- W4385874144 hasAuthorship W4385874144A5031611827 @default.
- W4385874144 hasAuthorship W4385874144A5034827326 @default.
- W4385874144 hasAuthorship W4385874144A5053255201 @default.
- W4385874144 hasAuthorship W4385874144A5058622372 @default.
- W4385874144 hasAuthorship W4385874144A5063183928 @default.
- W4385874144 hasBestOaLocation W43858741441 @default.
- W4385874144 hasConcept C100082104 @default.
- W4385874144 hasConcept C159985019 @default.
- W4385874144 hasConcept C171250308 @default.
- W4385874144 hasConcept C191897082 @default.
- W4385874144 hasConcept C192562407 @default.
- W4385874144 hasConcept C194760766 @default.
- W4385874144 hasConcept C199360897 @default.
- W4385874144 hasConcept C2777431650 @default.
- W4385874144 hasConcept C2779227376 @default.
- W4385874144 hasConcept C41008148 @default.
- W4385874144 hasConcept C49040817 @default.
- W4385874144 hasConcept C544956773 @default.
- W4385874144 hasConcept C551831248 @default.
- W4385874144 hasConcept C86194701 @default.
- W4385874144 hasConcept C9395851 @default.
- W4385874144 hasConceptScore W4385874144C100082104 @default.
- W4385874144 hasConceptScore W4385874144C159985019 @default.
- W4385874144 hasConceptScore W4385874144C171250308 @default.
- W4385874144 hasConceptScore W4385874144C191897082 @default.
- W4385874144 hasConceptScore W4385874144C192562407 @default.
- W4385874144 hasConceptScore W4385874144C194760766 @default.
- W4385874144 hasConceptScore W4385874144C199360897 @default.
- W4385874144 hasConceptScore W4385874144C2777431650 @default.
- W4385874144 hasConceptScore W4385874144C2779227376 @default.
- W4385874144 hasConceptScore W4385874144C41008148 @default.
- W4385874144 hasConceptScore W4385874144C49040817 @default.
- W4385874144 hasConceptScore W4385874144C544956773 @default.
- W4385874144 hasConceptScore W4385874144C551831248 @default.
- W4385874144 hasConceptScore W4385874144C86194701 @default.
- W4385874144 hasConceptScore W4385874144C9395851 @default.
- W4385874144 hasFunder F4320306076 @default.
- W4385874144 hasFunder F4320306084 @default.