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- W4386071746 abstract "Each downsizing of the DRAM capacitor circle will bring great benefits along with many production related process problems at the same time. In the R&D stage, tremendous accurate metrology results, such as critical dimensions of capacitor circles, are necessary to be obtained. However, DRAM capacitors are fabricated by bunches of different process steps, the final internal structure of capacitor array cannot be obtained by surface scan metrology tools. In DRAM capacitor structure design stage, cross-section TEM image analysis will be used to perform new design verification and improvement plan tracking. To manually measure details such as critical dimensions in TEM images is very time consuming. In order to improve the efficiency of analysis, this paper developed a rapid DRAM capacitor analyzing system, which can obtain the critical dimensions of capacitor circles quickly, in batches and with visibility." @default.
- W4386071746 created "2023-08-23" @default.
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- W4386071746 date "2023-06-26" @default.
- W4386071746 modified "2023-09-27" @default.
- W4386071746 title "Computer Vision Technology Supported Rapid DRAM Capacitor Analyzing System Based On TEM Image" @default.
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- W4386071746 doi "https://doi.org/10.1109/cstic58779.2023.10219257" @default.
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