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- W4386075003 abstract "To effectively improve the quality and performance of products, improving the capability and efficiency of failure analysis (FA) is impending. Routine analysis method may not suitable for every case and is short of efficiency. In this paper, we mainly introduce hot spot localization methods to solve different MIM cases. For abnormal capacitance cases, PVC is a convenient localization way. For small-scale cases, EBAC with differential amplifiers could be applied. For cases hard to localize fail site, deprocessing is suggested. Finally, in-situ TEM is introduced as a potential equipment to study MIM breakdown mechanism." @default.
- W4386075003 created "2023-08-23" @default.
- W4386075003 creator A5013443735 @default.
- W4386075003 creator A5058372890 @default.
- W4386075003 creator A5077481906 @default.
- W4386075003 date "2023-06-26" @default.
- W4386075003 modified "2023-09-27" @default.
- W4386075003 title "Novel Localization Approaches in Metal-Insulator-Metal Structure Failure Analysis" @default.
- W4386075003 cites W2097920131 @default.
- W4386075003 doi "https://doi.org/10.1109/cstic58779.2023.10219190" @default.
- W4386075003 hasPublicationYear "2023" @default.
- W4386075003 type Work @default.
- W4386075003 citedByCount "0" @default.
- W4386075003 crossrefType "proceedings-article" @default.
- W4386075003 hasAuthorship W4386075003A5013443735 @default.
- W4386075003 hasAuthorship W4386075003A5058372890 @default.
- W4386075003 hasAuthorship W4386075003A5077481906 @default.
- W4386075003 hasConcept C121332964 @default.
- W4386075003 hasConcept C127413603 @default.
- W4386075003 hasConcept C159985019 @default.
- W4386075003 hasConcept C17525397 @default.
- W4386075003 hasConcept C192562407 @default.
- W4386075003 hasConcept C212702 @default.
- W4386075003 hasConcept C24326235 @default.
- W4386075003 hasConcept C30066665 @default.
- W4386075003 hasConcept C3018344627 @default.
- W4386075003 hasConcept C41008148 @default.
- W4386075003 hasConcept C49040817 @default.
- W4386075003 hasConcept C62520636 @default.
- W4386075003 hasConceptScore W4386075003C121332964 @default.
- W4386075003 hasConceptScore W4386075003C127413603 @default.
- W4386075003 hasConceptScore W4386075003C159985019 @default.
- W4386075003 hasConceptScore W4386075003C17525397 @default.
- W4386075003 hasConceptScore W4386075003C192562407 @default.
- W4386075003 hasConceptScore W4386075003C212702 @default.
- W4386075003 hasConceptScore W4386075003C24326235 @default.
- W4386075003 hasConceptScore W4386075003C30066665 @default.
- W4386075003 hasConceptScore W4386075003C3018344627 @default.
- W4386075003 hasConceptScore W4386075003C41008148 @default.
- W4386075003 hasConceptScore W4386075003C49040817 @default.
- W4386075003 hasConceptScore W4386075003C62520636 @default.
- W4386075003 hasLocation W43860750031 @default.
- W4386075003 hasOpenAccess W4386075003 @default.
- W4386075003 hasPrimaryLocation W43860750031 @default.
- W4386075003 hasRelatedWork W1968555250 @default.
- W4386075003 hasRelatedWork W1989070203 @default.
- W4386075003 hasRelatedWork W2028271553 @default.
- W4386075003 hasRelatedWork W2321102139 @default.
- W4386075003 hasRelatedWork W2557996241 @default.
- W4386075003 hasRelatedWork W2593200884 @default.
- W4386075003 hasRelatedWork W2802164904 @default.
- W4386075003 hasRelatedWork W2899084033 @default.
- W4386075003 hasRelatedWork W2979196280 @default.
- W4386075003 hasRelatedWork W4253731651 @default.
- W4386075003 isParatext "false" @default.
- W4386075003 isRetracted "false" @default.
- W4386075003 workType "article" @default.