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- W4386075078 abstract "Ceria based slurry have been extensively applied to chemical mechanical planarization (CMP) such as STI (shallow trench isolation) and inter-level dielectric (ILD) process. Taken bulk SiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> into account, high removal rate is one of the important factors. The material removal rate depends upon the surface properties of the polishing pad and the conditioning process. Without regeneration of the pad surface during polishing, the removal rate of oxide rapidly increases. By evaluating the regeneration of the pad surface during polishing, the relationship between polishing pad surface feature regeneration and the effect on polish rates is analyzed. In addition, pad is one of the key factors to affect removal rate. Removal rate has a stronger correlation with condition process, when pad with larger groove density and smaller pore size." @default.
- W4386075078 created "2023-08-23" @default.
- W4386075078 creator A5010507657 @default.
- W4386075078 creator A5018805217 @default.
- W4386075078 creator A5064193335 @default.
- W4386075078 date "2023-06-26" @default.
- W4386075078 modified "2023-09-27" @default.
- W4386075078 title "Pad Surface Variation and its Effect on SiO<sub>2</sub> Removal Rate in Ceria-based CMP Slurry" @default.
- W4386075078 cites W1864060458 @default.
- W4386075078 cites W1972207333 @default.
- W4386075078 cites W2023152114 @default.
- W4386075078 cites W2041864272 @default.
- W4386075078 cites W2086483556 @default.
- W4386075078 cites W2100342067 @default.
- W4386075078 cites W2806796909 @default.
- W4386075078 cites W590425236 @default.
- W4386075078 doi "https://doi.org/10.1109/cstic58779.2023.10219240" @default.
- W4386075078 hasPublicationYear "2023" @default.
- W4386075078 type Work @default.
- W4386075078 citedByCount "0" @default.
- W4386075078 crossrefType "proceedings-article" @default.
- W4386075078 hasAuthorship W4386075078A5010507657 @default.
- W4386075078 hasAuthorship W4386075078A5018805217 @default.
- W4386075078 hasAuthorship W4386075078A5064193335 @default.
- W4386075078 hasConcept C105066941 @default.
- W4386075078 hasConcept C107365816 @default.
- W4386075078 hasConcept C127413603 @default.
- W4386075078 hasConcept C133386390 @default.
- W4386075078 hasConcept C138113353 @default.
- W4386075078 hasConcept C155310634 @default.
- W4386075078 hasConcept C159985019 @default.
- W4386075078 hasConcept C180088628 @default.
- W4386075078 hasConcept C191897082 @default.
- W4386075078 hasConcept C192562407 @default.
- W4386075078 hasConcept C2779227376 @default.
- W4386075078 hasConcept C2779472054 @default.
- W4386075078 hasConcept C2779851234 @default.
- W4386075078 hasConcept C42360764 @default.
- W4386075078 hasConcept C49040817 @default.
- W4386075078 hasConcept C94293008 @default.
- W4386075078 hasConceptScore W4386075078C105066941 @default.
- W4386075078 hasConceptScore W4386075078C107365816 @default.
- W4386075078 hasConceptScore W4386075078C127413603 @default.
- W4386075078 hasConceptScore W4386075078C133386390 @default.
- W4386075078 hasConceptScore W4386075078C138113353 @default.
- W4386075078 hasConceptScore W4386075078C155310634 @default.
- W4386075078 hasConceptScore W4386075078C159985019 @default.
- W4386075078 hasConceptScore W4386075078C180088628 @default.
- W4386075078 hasConceptScore W4386075078C191897082 @default.
- W4386075078 hasConceptScore W4386075078C192562407 @default.
- W4386075078 hasConceptScore W4386075078C2779227376 @default.
- W4386075078 hasConceptScore W4386075078C2779472054 @default.
- W4386075078 hasConceptScore W4386075078C2779851234 @default.
- W4386075078 hasConceptScore W4386075078C42360764 @default.
- W4386075078 hasConceptScore W4386075078C49040817 @default.
- W4386075078 hasConceptScore W4386075078C94293008 @default.
- W4386075078 hasLocation W43860750781 @default.
- W4386075078 hasOpenAccess W4386075078 @default.
- W4386075078 hasPrimaryLocation W43860750781 @default.
- W4386075078 hasRelatedWork W1969182676 @default.
- W4386075078 hasRelatedWork W1974780122 @default.
- W4386075078 hasRelatedWork W1981933626 @default.
- W4386075078 hasRelatedWork W2047349890 @default.
- W4386075078 hasRelatedWork W2076501399 @default.
- W4386075078 hasRelatedWork W2088679661 @default.
- W4386075078 hasRelatedWork W2092476942 @default.
- W4386075078 hasRelatedWork W2364203019 @default.
- W4386075078 hasRelatedWork W2953773753 @default.
- W4386075078 hasRelatedWork W4255525512 @default.
- W4386075078 isParatext "false" @default.
- W4386075078 isRetracted "false" @default.
- W4386075078 workType "article" @default.