Matches in SemOpenAlex for { <https://semopenalex.org/work/W4386098240> ?p ?o ?g. }
- W4386098240 endingPage "6200" @default.
- W4386098240 startingPage "6200" @default.
- W4386098240 abstract "Niobium nitride (NbN) is widely used in the production of superconducting nanowire single-photon detectors (SNSPDs) due to its high superconducting transition temperature and suitable energy gap. The processing parameters used for the preparation of NbN films and the subsequent processing of nanowires have a significant effect on the performance of the SNSPD. In this review, we will present various thin film growth methods, including magnetron sputtering, atomic layer deposition (ALD), and chemical vapor deposition (CVD). The relationships between the superconducting performance of each thin film and the corresponding deposition process will be discussed. Subsequently, NbN nanowire fabrication methods and microstructures based on thin film etching will be summarized, and their impact on the qualities of the finished SNSPDs will be systematically analyzed. Finally, we will provide an outlook for the future development of preparation for SNSPD." @default.
- W4386098240 created "2023-08-24" @default.
- W4386098240 creator A5009884711 @default.
- W4386098240 creator A5063976130 @default.
- W4386098240 date "2023-08-23" @default.
- W4386098240 modified "2023-09-27" @default.
- W4386098240 title "Niobium Nitride Preparation for Superconducting Single-Photon Detectors" @default.
- W4386098240 cites W1968132633 @default.
- W4386098240 cites W1970134928 @default.
- W4386098240 cites W1977556382 @default.
- W4386098240 cites W1980141702 @default.
- W4386098240 cites W1993720505 @default.
- W4386098240 cites W1995640033 @default.
- W4386098240 cites W1998001599 @default.
- W4386098240 cites W2005865770 @default.
- W4386098240 cites W2007399377 @default.
- W4386098240 cites W2010451492 @default.
- W4386098240 cites W2023317322 @default.
- W4386098240 cites W2031513573 @default.
- W4386098240 cites W2035931858 @default.
- W4386098240 cites W2037465515 @default.
- W4386098240 cites W2043787737 @default.
- W4386098240 cites W2057759815 @default.
- W4386098240 cites W2058229683 @default.
- W4386098240 cites W2059759550 @default.
- W4386098240 cites W2062452121 @default.
- W4386098240 cites W2063506104 @default.
- W4386098240 cites W2064871677 @default.
- W4386098240 cites W2064991470 @default.
- W4386098240 cites W2067542565 @default.
- W4386098240 cites W2069981020 @default.
- W4386098240 cites W2072508376 @default.
- W4386098240 cites W2081775544 @default.
- W4386098240 cites W2082591593 @default.
- W4386098240 cites W2084946636 @default.
- W4386098240 cites W2094817489 @default.
- W4386098240 cites W2098363587 @default.
- W4386098240 cites W2099672736 @default.
- W4386098240 cites W2136024330 @default.
- W4386098240 cites W2138719569 @default.
- W4386098240 cites W2142531082 @default.
- W4386098240 cites W2235289241 @default.
- W4386098240 cites W2320902926 @default.
- W4386098240 cites W2331063185 @default.
- W4386098240 cites W2335403917 @default.
- W4386098240 cites W2497308166 @default.
- W4386098240 cites W2510586932 @default.
- W4386098240 cites W2568283859 @default.
- W4386098240 cites W2605450286 @default.
- W4386098240 cites W2624204670 @default.
- W4386098240 cites W2754181820 @default.
- W4386098240 cites W2759798221 @default.
- W4386098240 cites W2763322774 @default.
- W4386098240 cites W2767621545 @default.
- W4386098240 cites W2770324164 @default.
- W4386098240 cites W2771506524 @default.
- W4386098240 cites W2784141955 @default.
- W4386098240 cites W2801437472 @default.
- W4386098240 cites W2805919345 @default.
- W4386098240 cites W2842177201 @default.
- W4386098240 cites W2902671293 @default.
- W4386098240 cites W2963544576 @default.
- W4386098240 cites W2963945280 @default.
- W4386098240 cites W2973125163 @default.
- W4386098240 cites W2995918371 @default.
- W4386098240 cites W2999047275 @default.
- W4386098240 cites W3000252226 @default.
- W4386098240 cites W3001010696 @default.
- W4386098240 cites W3010109933 @default.
- W4386098240 cites W3020311045 @default.
- W4386098240 cites W3030182869 @default.
- W4386098240 cites W3034325520 @default.
- W4386098240 cites W3035962234 @default.
- W4386098240 cites W3044561968 @default.
- W4386098240 cites W3048903903 @default.
- W4386098240 cites W3049270766 @default.
- W4386098240 cites W3099386865 @default.
- W4386098240 cites W3100452289 @default.
- W4386098240 cites W3100603768 @default.
- W4386098240 cites W3102051877 @default.
- W4386098240 cites W3102365945 @default.
- W4386098240 cites W3102472679 @default.
- W4386098240 cites W3102497522 @default.
- W4386098240 cites W3104330722 @default.
- W4386098240 cites W3105205584 @default.
- W4386098240 cites W3105820612 @default.
- W4386098240 cites W3130381925 @default.
- W4386098240 cites W3130843939 @default.
- W4386098240 cites W3134436026 @default.
- W4386098240 cites W3137665909 @default.
- W4386098240 cites W3139456413 @default.
- W4386098240 cites W3161172218 @default.
- W4386098240 cites W3179671472 @default.
- W4386098240 cites W3182016564 @default.
- W4386098240 cites W3190813580 @default.
- W4386098240 cites W3196805841 @default.
- W4386098240 cites W3206595186 @default.
- W4386098240 cites W4221063526 @default.