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- W4386182527 abstract "纹波系数是超辐射发光二极管（SLD）的关键指标，增透薄膜被用于降低纹波系数。基于平面波方法的增透膜设计得到广泛应用，然而倾斜腔面SLD中增透膜的性能普遍不佳，使用时域有限差分方法进行分析，发现存在反射曲线偏离和反射率高等问题。优化了增透膜设计，优化后1°~10°腔面倾角内的反射率降低，降幅最高达82%，其中双层增透膜反射率低于0.05%。采用反应磁控溅射工艺镀膜，并验证了优化设计效果。经过增透膜优化，光谱纹波得到有效抑制，SLD管芯纹波系数和调制系数分别仅为0.019 dB和2.30×10-3，降幅超过50%，在100 mA的驱动电流下仍保持10 mW的光功率。所研制的增透膜能够有效减小腔面反射率，利用该增透膜制备了低纹波SLD。研究结果为SLD及其他半导体光电子器件的光学薄膜研制提供了参考。" @default.
- W4386182527 created "2023-08-26" @default.
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- W4386182527 date "2023-01-01" @default.
- W4386182527 modified "2023-09-30" @default.
- W4386182527 title "低纹波超辐射发光二极管的增透膜研制" @default.
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- W4386182527 doi "https://doi.org/10.3788/cjl220983" @default.
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