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• W4386233955 abstract "液相外延是碲镉汞（MCT）薄膜生长领域最成熟的一种方法，被众多红外探测器研究机构和生产商所采用。然而由于MCT材料自身属性和具体制备工艺的原因，液相外延生长过程中不可避免地会产生各种缺陷，从而降低红外探测器的性能。为了增加对液相外延MCT薄膜中缺陷的认识，并对具体的生长工艺提供指导性建议，基于已报道的文献总结了液相外延MCT薄膜中所存在一些缺陷的特征以及形成机理和消除方法。对各类缺陷的形成机理和消除方法进行探讨和评估，有助于提高MCT薄膜液相外延的水平，为制造高性能MCT探测器做好材料技术支撑。" @default.
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• W4386233955 date "2023-01-01" @default.
• W4386233955 modified "2023-09-27" @default.
• W4386233955 title "液相外延碲镉汞薄膜缺陷综述" @default.
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• W4386233955 doi "https://doi.org/10.3788/irla20220804" @default.
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