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- W4386291282 abstract "Novel high resolution photolithography process is presented in this paper. New process and materials can use conventional exposure apparatuses with ghi‐line UV light to form high resolution pattern beyond the resolution limit of exposure apparatus." @default.
- W4386291282 created "2023-08-31" @default.
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- W4386291282 date "2023-06-01" @default.
- W4386291282 modified "2023-09-28" @default.
- W4386291282 title "13‐2: <i>Invited Paper:</i> Advanced Patterning Method Exceeding a Limitation of Lithography with Resolution Enhancement Technology (RET)" @default.
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- W4386291282 doi "https://doi.org/10.1002/sdtp.16513" @default.
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