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- W4386429334 abstract "We have investigated the effect of N <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> ratio in Ar-N <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> sputtering gas on tunneling magneto-dielectric (TMD) effect in Co <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>19</inf> –(Si–N) <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>81</inf> nanogranular films. Co <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>19</inf> –(Si–N) <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>81</inf> films were deposited by co-sputtering Co and Si <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> N <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>4</inf> targets in Ar-x vol.%N <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> mixture gas with different x of 0 to 30. All deposited films have nanogranular structure composed of Co nanogranules with a diameter of 2 ~ 3 nm embedded in Si –N matrix, and we realized TMD effect in the film for x ≥ 3.3. The film deposited in Ar-6.6 vol.%N <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> gas showed the highest TMD response. Moreover, we found the two types of change in both nanostructure and the frequency dependence of TMD effect. This study provides the new way to tailor the frequency response of TMD effect." @default.
- W4386429334 created "2023-09-05" @default.
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- W4386429334 date "2023-05-01" @default.
- W4386429334 modified "2023-09-26" @default.
- W4386429334 title "Effect of Ar-N<sub>2</sub> sputtering gas on structure and TMD effect in Co–(Si–N) nanogranular films" @default.
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- W4386429334 doi "https://doi.org/10.1109/intermagshortpapers58606.2023.10228457" @default.
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