Matches in SemOpenAlex for { <https://semopenalex.org/work/W4386475366> ?p ?o ?g. }
- W4386475366 abstract "NiO is an interesting transition metal oxide due to its fascinating properties. High crystalline thin films of NiO are preferred for use in a variety of device applications but are challenging to deposit at low temperatures. We have prepared epitaxial thin films of NiO with [111] as the preferred growth direction on a c-plane sapphire substrate at relatively low temperatures using plasma-enhanced atomic layer deposition (PEALD) exploiting a simple nickel precursor with oxygen plasma. The evolution of crystallinity and surface morphology of the films were studied as a function of substrate temperature. Ultra-smooth NiO films with excellent crystallinity were prepared at 250 °C without the necessity for post-annealing. Different microscopic and spectroscopic methods revealed film characteristics. The magnetic properties of (111) oriented epitaxial NiO films prepared using PEALD are explored for the first time, and they are antiferromagnetic in nature." @default.
- W4386475366 created "2023-09-07" @default.
- W4386475366 creator A5010831344 @default.
- W4386475366 creator A5054098040 @default.
- W4386475366 creator A5056437039 @default.
- W4386475366 creator A5061896202 @default.
- W4386475366 date "2023-09-01" @default.
- W4386475366 modified "2023-09-27" @default.
- W4386475366 title "High crystalline epitaxial thin films of NiO by plasma-enhanced ALD and their properties" @default.
- W4386475366 cites W1846931230 @default.
- W4386475366 cites W1918782739 @default.
- W4386475366 cites W1970350290 @default.
- W4386475366 cites W1972499132 @default.
- W4386475366 cites W1981327965 @default.
- W4386475366 cites W1983759638 @default.
- W4386475366 cites W1983951555 @default.
- W4386475366 cites W1986367816 @default.
- W4386475366 cites W2001418025 @default.
- W4386475366 cites W2010579703 @default.
- W4386475366 cites W2014724250 @default.
- W4386475366 cites W2018750909 @default.
- W4386475366 cites W2026412437 @default.
- W4386475366 cites W2034620502 @default.
- W4386475366 cites W2035931858 @default.
- W4386475366 cites W2039606243 @default.
- W4386475366 cites W2041169868 @default.
- W4386475366 cites W2041416118 @default.
- W4386475366 cites W2047253725 @default.
- W4386475366 cites W2055371445 @default.
- W4386475366 cites W2057048246 @default.
- W4386475366 cites W2058187610 @default.
- W4386475366 cites W2058463134 @default.
- W4386475366 cites W2060253006 @default.
- W4386475366 cites W2064900988 @default.
- W4386475366 cites W2070618301 @default.
- W4386475366 cites W2071499097 @default.
- W4386475366 cites W2074918191 @default.
- W4386475366 cites W2079572889 @default.
- W4386475366 cites W2093943898 @default.
- W4386475366 cites W2098056216 @default.
- W4386475366 cites W2149248689 @default.
- W4386475366 cites W2152622034 @default.
- W4386475366 cites W2158932701 @default.
- W4386475366 cites W2163601198 @default.
- W4386475366 cites W2171865678 @default.
- W4386475366 cites W2196764281 @default.
- W4386475366 cites W2322485648 @default.
- W4386475366 cites W2403433049 @default.
- W4386475366 cites W2528023323 @default.
- W4386475366 cites W2792237805 @default.
- W4386475366 cites W2803187439 @default.
- W4386475366 cites W2890744548 @default.
- W4386475366 cites W2909393416 @default.
- W4386475366 cites W2913708758 @default.
- W4386475366 cites W2922379476 @default.
- W4386475366 cites W2942999426 @default.
- W4386475366 cites W2945901058 @default.
- W4386475366 cites W2959851186 @default.
- W4386475366 cites W2966083854 @default.
- W4386475366 cites W2976479568 @default.
- W4386475366 cites W3000676524 @default.
- W4386475366 cites W3012984742 @default.
- W4386475366 cites W3015185111 @default.
- W4386475366 cites W3043444518 @default.
- W4386475366 cites W3134020043 @default.
- W4386475366 cites W3208489640 @default.
- W4386475366 cites W4221094460 @default.
- W4386475366 cites W4309694660 @default.
- W4386475366 cites W4328049714 @default.
- W4386475366 doi "https://doi.org/10.1063/5.0157628" @default.
- W4386475366 hasPublicationYear "2023" @default.
- W4386475366 type Work @default.
- W4386475366 citedByCount "0" @default.
- W4386475366 crossrefType "journal-article" @default.
- W4386475366 hasAuthorship W4386475366A5010831344 @default.
- W4386475366 hasAuthorship W4386475366A5054098040 @default.
- W4386475366 hasAuthorship W4386475366A5056437039 @default.
- W4386475366 hasAuthorship W4386475366A5061896202 @default.
- W4386475366 hasBestOaLocation W43864753661 @default.
- W4386475366 hasConcept C110738630 @default.
- W4386475366 hasConcept C111368507 @default.
- W4386475366 hasConcept C120665830 @default.
- W4386475366 hasConcept C121332964 @default.
- W4386475366 hasConcept C127313418 @default.
- W4386475366 hasConcept C127413603 @default.
- W4386475366 hasConcept C159985019 @default.
- W4386475366 hasConcept C161790260 @default.
- W4386475366 hasConcept C171250308 @default.
- W4386475366 hasConcept C185592680 @default.
- W4386475366 hasConcept C19067145 @default.
- W4386475366 hasConcept C191897082 @default.
- W4386475366 hasConcept C192562407 @default.
- W4386475366 hasConcept C2776652806 @default.
- W4386475366 hasConcept C2777289219 @default.
- W4386475366 hasConcept C2777855556 @default.
- W4386475366 hasConcept C2779227376 @default.
- W4386475366 hasConcept C2779851234 @default.
- W4386475366 hasConcept C2780064504 @default.
- W4386475366 hasConcept C42360764 @default.
- W4386475366 hasConcept C46275449 @default.