FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4386476065> ?p ?o ?g. }

• W4386476065 endingPage "138714" @default.
• W4386476065 startingPage "138714" @default.
• W4386476065 abstract "Ultrapure water (UPW) is essential in the semiconductor industry for rinsing and cleaning products. With the growing demand for UPW, various feed water sources such as tap water, surface water, and wastewater are utilized to produce UPW. However, these feed water sources contain various low molecular weight organic matters (LMWOMs), which can adversely affect the quality of semiconductors when present in treated UPW. Therefore, achieving the complete removal of LMWOMs is crucial in the UPW production process. However, the current reverse osmosis (RO) and vacuum ultraviolet (VUV) processes employed for UPW production have limitations in achieving complete LMWOM removal. Therefore, this study is conducted to investigate the mechanisms of LMWOM removal in RO and the performance of VUV for high-quality UPW production. Six LMWOMs found in the semiconductor industry were tested for lab- and pilot-scale experiments. The result showed that size exclusion is the main mechanism of LMWOM removal in the RO process. However, methanol, ethanol, and urea were not efficiently removed by RO membranes. In addition, a lab-scale VUV experiment was performed under accelerated conditions to examine the oxidation mechanism of LMWOM. The LMWOM with low reactivity to hydroxyl radicals, such as tetramethylammonium hydroxide (TMAH) and urea, were not removed perfectly within 60 min and 180 min, respectively. Furthermore, a pilot-scale VUV experiment was performed to examine the oxidation of LMWOM under real UPW production conditions. Despite observing a correlation in the pseudo-first-order rate constants between the lab-scale and pilot-scale experiments, the removal of TMAH and urea was still not achieved even with a lamp power of 320 W. As urea was not completely removed by either RO or VUV, strategies for UPW production using current water sources are discussed to develop future UPW technologies." @default.
• W4386476065 created "2023-09-07" @default.
• W4386476065 creator A5041133347 @default.
• W4386476065 creator A5041795180 @default.
• W4386476065 creator A5049024628 @default.
• W4386476065 creator A5075218521 @default.
• W4386476065 date "2023-10-01" @default.
• W4386476065 modified "2023-10-09" @default.
• W4386476065 title "Fate of low molecular weight organic matters in reverse osmosis and vacuum ultraviolet process for high-quality ultrapure water production in the semiconductor industry" @default.
• W4386476065 cites W1951225498 @default.
• W4386476065 cites W1964842049 @default.
• W4386476065 cites W1969899546 @default.
• W4386476065 cites W1976643528 @default.
• W4386476065 cites W1986501166 @default.
• W4386476065 cites W2026981616 @default.
• W4386476065 cites W2035810080 @default.
• W4386476065 cites W2040239861 @default.
• W4386476065 cites W2041009580 @default.
• W4386476065 cites W2047417053 @default.
• W4386476065 cites W2047979779 @default.
• W4386476065 cites W2054996192 @default.
• W4386476065 cites W2061863188 @default.
• W4386476065 cites W2061955741 @default.
• W4386476065 cites W2089443973 @default.
• W4386476065 cites W2114806846 @default.
• W4386476065 cites W2131454075 @default.
• W4386476065 cites W2147366348 @default.
• W4386476065 cites W2152783510 @default.
• W4386476065 cites W2156220408 @default.
• W4386476065 cites W2255873596 @default.
• W4386476065 cites W2322611965 @default.
• W4386476065 cites W2369476279 @default.
• W4386476065 cites W2520852116 @default.
• W4386476065 cites W2593583391 @default.
• W4386476065 cites W2753536148 @default.
• W4386476065 cites W2781820339 @default.
• W4386476065 cites W2792892989 @default.
• W4386476065 cites W2799343121 @default.
• W4386476065 cites W2893698606 @default.
• W4386476065 cites W2912503476 @default.
• W4386476065 cites W2916537744 @default.
• W4386476065 cites W2938857700 @default.
• W4386476065 cites W2947706125 @default.
• W4386476065 cites W2947825621 @default.
• W4386476065 cites W2995776398 @default.
• W4386476065 cites W3017697247 @default.
• W4386476065 cites W3174983094 @default.
• W4386476065 cites W4205143988 @default.
• W4386476065 cites W4223582200 @default.
• W4386476065 cites W4292684912 @default.
• W4386476065 cites W4296218867 @default.
• W4386476065 cites W4313547521 @default.
• W4386476065 cites W4323924745 @default.
• W4386476065 doi "https://doi.org/10.1016/j.jclepro.2023.138714" @default.
• W4386476065 hasPublicationYear "2023" @default.
• W4386476065 type Work @default.
• W4386476065 citedByCount "0" @default.
• W4386476065 crossrefType "journal-article" @default.
• W4386476065 hasAuthorship W4386476065A5041133347 @default.
• W4386476065 hasAuthorship W4386476065A5041795180 @default.
• W4386476065 hasAuthorship W4386476065A5049024628 @default.
• W4386476065 hasAuthorship W4386476065A5075218521 @default.
• W4386476065 hasConcept C127413603 @default.
• W4386476065 hasConcept C130797344 @default.
• W4386476065 hasConcept C185592680 @default.
• W4386476065 hasConcept C2775865663 @default.
• W4386476065 hasConcept C2778829809 @default.
• W4386476065 hasConcept C39432304 @default.
• W4386476065 hasConcept C41625074 @default.
• W4386476065 hasConcept C42360764 @default.
• W4386476065 hasConcept C528095902 @default.
• W4386476065 hasConcept C55493867 @default.
• W4386476065 hasConcept C87717796 @default.
• W4386476065 hasConcept C94061648 @default.
• W4386476065 hasConceptScore W4386476065C127413603 @default.
• W4386476065 hasConceptScore W4386476065C130797344 @default.
• W4386476065 hasConceptScore W4386476065C185592680 @default.
• W4386476065 hasConceptScore W4386476065C2775865663 @default.
• W4386476065 hasConceptScore W4386476065C2778829809 @default.
• W4386476065 hasConceptScore W4386476065C39432304 @default.
• W4386476065 hasConceptScore W4386476065C41625074 @default.
• W4386476065 hasConceptScore W4386476065C42360764 @default.
• W4386476065 hasConceptScore W4386476065C528095902 @default.
• W4386476065 hasConceptScore W4386476065C55493867 @default.
• W4386476065 hasConceptScore W4386476065C87717796 @default.
• W4386476065 hasConceptScore W4386476065C94061648 @default.
• W4386476065 hasFunder F4320322007 @default.
• W4386476065 hasFunder F4320334877 @default.
• W4386476065 hasLocation W43864760651 @default.
• W4386476065 hasOpenAccess W4386476065 @default.
• W4386476065 hasPrimaryLocation W43864760651 @default.
• W4386476065 hasRelatedWork W2000322808 @default.
• W4386476065 hasRelatedWork W2021702618 @default.
• W4386476065 hasRelatedWork W2034877551 @default.
• W4386476065 hasRelatedWork W2068440071 @default.
• W4386476065 hasRelatedWork W2094769479 @default.
• W4386476065 hasRelatedWork W2330334691 @default.
• W4386476065 hasRelatedWork W2374180551 @default.

• next