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- W4386829401 abstract "This research compares the use of NF 3 and SF 6 process gases for the removal of the native oxide from Al mirrors and their subsequent fluorination using low-temperature electron-beam generated plasmas. This single step process produces a stoichiometric AlF 3 layer of controllable thickness which provides an excellent passivation layer for Al mirrors for far-ultraviolet optics applications. We show that NF 3 produces more atomic F content within the plasma than SF 6 for similar process conditions, allowing faster oxide removal and fluoride film growth. Al mirrors passivated in either SF 6 or NF 3 were subsequently studied as a function of gas flow concentration. We found that above a threshold value of atomic F content in the plasma (≈2 × 10 18 m −3 ) samples processed with SF 6 or NF 3 exhibit similar optical and structural properties regardless of process parameters." @default.
- W4386829401 created "2023-09-19" @default.
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- W4386829401 date "2023-10-09" @default.
- W4386829401 modified "2023-10-10" @default.
- W4386829401 title "Passivation of Aluminum mirrors with SF6- or NF3-based plasmas" @default.
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- W4386829401 doi "https://doi.org/10.1364/ome.499273" @default.
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