Matches in SemOpenAlex for { <https://semopenalex.org/work/W4386838491> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W4386838491 endingPage "3910" @default.
- W4386838491 startingPage "3910" @default.
- W4386838491 abstract "In modern semiconductor manufacturing, the computer-integrated manufacturing system plays an essential role in automation with plenty of software systems. Among them, the equipment automation program (EAP) is one of the fundamental systems to support the interconnection of various types of equipment. For the traditional EAP, the communication and logic models are tightly coupled. The occurrence of any exception in EAP may make the EAP power down such that no equipment is reachable. Additionally, it can handle a couple of manufacturing tools only. The extension of manufacturing tools in a semiconductor fab makes the investment in EAP unbearable. Thus, fabs are highly desired to solve such problems of the traditional EAP. To do so, this work designs a new framework for a distributed EAP system with new technologies being adopted to enhance the usage and stability of EAP. Additionally, this design philosophy makes the distributed EAP system more compatible and expansible. Further, this EAP system can be upgraded as communication and big data technologies advance. Experiments are carried out to verify the stability of the designed distributed EAP system." @default.
- W4386838491 created "2023-09-19" @default.
- W4386838491 creator A5032255696 @default.
- W4386838491 creator A5044196048 @default.
- W4386838491 creator A5048826252 @default.
- W4386838491 creator A5068252474 @default.
- W4386838491 creator A5090664309 @default.
- W4386838491 creator A5091351344 @default.
- W4386838491 date "2023-09-16" @default.
- W4386838491 modified "2023-09-27" @default.
- W4386838491 title "A New Framework of the EAP System in Semiconductor Manufacturing Internet of Things" @default.
- W4386838491 cites W1574680346 @default.
- W4386838491 cites W2017894321 @default.
- W4386838491 cites W2074837693 @default.
- W4386838491 cites W2092627382 @default.
- W4386838491 cites W2164036497 @default.
- W4386838491 cites W2241118198 @default.
- W4386838491 cites W2326454698 @default.
- W4386838491 cites W2343888685 @default.
- W4386838491 cites W2344101367 @default.
- W4386838491 cites W2401537403 @default.
- W4386838491 cites W2508555779 @default.
- W4386838491 cites W2571654287 @default.
- W4386838491 cites W2621452375 @default.
- W4386838491 cites W2755059878 @default.
- W4386838491 cites W2791440698 @default.
- W4386838491 cites W2804147884 @default.
- W4386838491 cites W2961783518 @default.
- W4386838491 cites W2999258317 @default.
- W4386838491 cites W3012383331 @default.
- W4386838491 cites W3058230660 @default.
- W4386838491 cites W3195546965 @default.
- W4386838491 cites W4205418041 @default.
- W4386838491 cites W4318952645 @default.
- W4386838491 doi "https://doi.org/10.3390/electronics12183910" @default.
- W4386838491 hasPublicationYear "2023" @default.
- W4386838491 type Work @default.
- W4386838491 citedByCount "0" @default.
- W4386838491 crossrefType "journal-article" @default.
- W4386838491 hasAuthorship W4386838491A5032255696 @default.
- W4386838491 hasAuthorship W4386838491A5044196048 @default.
- W4386838491 hasAuthorship W4386838491A5048826252 @default.
- W4386838491 hasAuthorship W4386838491A5068252474 @default.
- W4386838491 hasAuthorship W4386838491A5090664309 @default.
- W4386838491 hasAuthorship W4386838491A5091351344 @default.
- W4386838491 hasBestOaLocation W43868384911 @default.
- W4386838491 hasConcept C110875604 @default.
- W4386838491 hasConcept C111919701 @default.
- W4386838491 hasConcept C115901376 @default.
- W4386838491 hasConcept C117671659 @default.
- W4386838491 hasConcept C119599485 @default.
- W4386838491 hasConcept C123745756 @default.
- W4386838491 hasConcept C127413603 @default.
- W4386838491 hasConcept C160671074 @default.
- W4386838491 hasConcept C201995342 @default.
- W4386838491 hasConcept C2777904410 @default.
- W4386838491 hasConcept C41008148 @default.
- W4386838491 hasConcept C66018809 @default.
- W4386838491 hasConcept C76155785 @default.
- W4386838491 hasConcept C78519656 @default.
- W4386838491 hasConceptScore W4386838491C110875604 @default.
- W4386838491 hasConceptScore W4386838491C111919701 @default.
- W4386838491 hasConceptScore W4386838491C115901376 @default.
- W4386838491 hasConceptScore W4386838491C117671659 @default.
- W4386838491 hasConceptScore W4386838491C119599485 @default.
- W4386838491 hasConceptScore W4386838491C123745756 @default.
- W4386838491 hasConceptScore W4386838491C127413603 @default.
- W4386838491 hasConceptScore W4386838491C160671074 @default.
- W4386838491 hasConceptScore W4386838491C201995342 @default.
- W4386838491 hasConceptScore W4386838491C2777904410 @default.
- W4386838491 hasConceptScore W4386838491C41008148 @default.
- W4386838491 hasConceptScore W4386838491C66018809 @default.
- W4386838491 hasConceptScore W4386838491C76155785 @default.
- W4386838491 hasConceptScore W4386838491C78519656 @default.
- W4386838491 hasIssue "18" @default.
- W4386838491 hasLocation W43868384911 @default.
- W4386838491 hasOpenAccess W4386838491 @default.
- W4386838491 hasPrimaryLocation W43868384911 @default.
- W4386838491 hasRelatedWork W1505698635 @default.
- W4386838491 hasRelatedWork W2140186278 @default.
- W4386838491 hasRelatedWork W2146421951 @default.
- W4386838491 hasRelatedWork W2149188425 @default.
- W4386838491 hasRelatedWork W2158486846 @default.
- W4386838491 hasRelatedWork W2168787312 @default.
- W4386838491 hasRelatedWork W2172117203 @default.
- W4386838491 hasRelatedWork W2508000282 @default.
- W4386838491 hasRelatedWork W3117892829 @default.
- W4386838491 hasRelatedWork W2486893889 @default.
- W4386838491 hasVolume "12" @default.
- W4386838491 isParatext "false" @default.
- W4386838491 isRetracted "false" @default.
- W4386838491 workType "article" @default.