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- W4386838685 abstract "Superlattices MFM capacitors are an important building block for ferroelectric memories. Embedded in the BEoL, they can be connected to either the gate or drain contact of a standard transistor to realize a 1T1C FeFET and a 1T1C FeRAM, respectively. Superlattices consisting of HfO2 and ZrO2 sublayers are a promising approach to improve and tailor important figures of merits of these BEoL MFM capacitors, as shown by David Lehninger and co-workers in article number 2200108." @default.
- W4386838685 created "2023-09-19" @default.
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- W4386838685 date "2023-09-01" @default.
- W4386838685 modified "2023-10-06" @default.
- W4386838685 title "Ferroelectric [HfO<sub>2</sub>/ZrO<sub>2</sub>] Superlattices with Enhanced Polarization, Tailored Coercive Field, and Improved High Temperature Reliability (Adv. Phys. Res. 9/2023)" @default.
- W4386838685 doi "https://doi.org/10.1002/apxr.202370018" @default.
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