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- W4386853071 abstract "In this work Electrolyte-Insulator-Semiconductor (EIS) device has been developed for pH measurements. This device operates as a Metal-Oxide-Semiconductor capacitor but instead of having the metal contact electrode, an electrolyte solution and a reference electrode are used to apply voltage. As dielectric material and sensitive membrane was chosen hafnium dioxide (HfO 2 ). This film was obtained by RF sputtering, and was structurally characterized by Raman and Ellipsometry. The structural characterization of HfO 2 thin film shows the presence of tetragonal phase, physical thickness of 50 nm and refractive index of 1.89, close to stochiometric of 1.91. Was developed MOS capacitors to make the electrical characterization of HfO 2 thin films in order to determine the thin film properties, defined by high dielectric constant value (high-k), lower charge density (Q 0 /q) and flat-band voltage (V FB ) around -0.9V. The electrical characterization done by Capacitance x Voltage (CxV) curves revealed high dielectric constant, V FB of 0.02V and Q 0 /q in the order of -10 +12 /cm 2 . The Current x Voltage (IxV) curve shows that the current through the dielectric is approximately 1x10 -9 A. With dielectric characterized it was possible to develop the EIS device. From electrical characterization it was possible to test the integrity of the electrodes and determined the sensitivity of the device. For electrical measurement of EIS was used Normalized Capacitance x Voltage curve (CxV curve) using different pH (3, 4, 5, 7, 9, 10 and 12) solutions. From the flat band voltage (V FB ) of the Normalized CxV curves was possible to determine the sensitivity of the device of 78mV/pH. This result is greater than the Nernst level and greater than results found in the literature." @default.
- W4386853071 created "2023-09-20" @default.
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- W4386853071 date "2023-08-28" @default.
- W4386853071 modified "2023-10-02" @default.
- W4386853071 title "Electrolyte-Insulator-Semiconductor (EIS) Device with Hafnium Dioxide (HfO<sub>2</sub>) for pH Detecting" @default.
- W4386853071 doi "https://doi.org/10.1149/ma2023-01522617mtgabs" @default.
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