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- W4386861137 abstract "Extreme-ultraviolet (EUV) lithography uses EUV light of an extremely short wavelength of 13.5 nm. This allows for exposure of fine circuit patterns with a half-pitch below 20 nm that cannot be exposed by the conventional optical lithography using an ArF excimer laser (Table 7.1)." @default.
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- W4386861137 date "2023-09-19" @default.
- W4386861137 modified "2023-09-27" @default.
- W4386861137 title "EUV Light Source for Lithography" @default.
- W4386861137 doi "https://doi.org/10.1117/3.2638242.ch7" @default.
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