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- W4386882661 abstract "A double-reflection confocal probe technique for surface profiling microscopy is presented. By delivering a small collimated laser beam at an off-axis position into a microscope objective to allow retro-reflection on the first reflected beam from the surface under test, second reflection at the same point of the test surface can be established. The feasibility of this technique is experimental investigated. This approach improves the axial resolution by a factor of two as compared to that of the conventional single-reflection system. Simulation is performed to estimate and evaluate the lateral scanning performance of the double-reflection system." @default.
- W4386882661 created "2023-09-21" @default.
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- W4386882661 date "2023-09-20" @default.
- W4386882661 modified "2023-10-06" @default.
- W4386882661 title "Double-reflection confocal probe for surface profiling microscopy with improved axial resolution" @default.
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- W4386882661 doi "https://doi.org/10.1117/12.3005555" @default.
- W4386882661 hasPublicationYear "2023" @default.
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