Matches in SemOpenAlex for { <https://semopenalex.org/work/W4386883102> ?p ?o ?g. }
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- W4386883102 endingPage "1" @default.
- W4386883102 startingPage "1" @default.
- W4386883102 abstract "In this work, the self-aligned coplanar top gate In-Ga-Zn-O thin-film transistor with a stepped substrate structure was investigated to suppress the short-channel effect. Usually, Vth roll-off occurs as channel length decreases due to a large gate and source/drain overlap (ΔL), attributed to the significant diffusion of high carrier density from n <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>+</sup> S/D regions into the main IGZO channel. In the proposed structure, the stepped structure induces gate insulator extension that covers the side edge of the main IGZO channel and protects from Ar plasma treatment, which forms n <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>+</sup> regions. The fabrication results show that the short-channel effect can be successfully suppressed up to 2 μm channel length with 0.23 μm ΔL." @default.
- W4386883102 created "2023-09-21" @default.
- W4386883102 creator A5001402010 @default.
- W4386883102 creator A5058092954 @default.
- W4386883102 creator A5060797747 @default.
- W4386883102 date "2023-01-01" @default.
- W4386883102 modified "2023-09-27" @default.
- W4386883102 title "Self-Aligned Top-Gate IGZO TFT with Stepped Structure for Suppressing Short Channel Effect" @default.
- W4386883102 doi "https://doi.org/10.1109/led.2023.3317403" @default.
- W4386883102 hasPublicationYear "2023" @default.
- W4386883102 type Work @default.
- W4386883102 citedByCount "0" @default.
- W4386883102 crossrefType "journal-article" @default.
- W4386883102 hasAuthorship W4386883102A5001402010 @default.
- W4386883102 hasAuthorship W4386883102A5058092954 @default.
- W4386883102 hasAuthorship W4386883102A5060797747 @default.
- W4386883102 hasConcept C113196181 @default.
- W4386883102 hasConcept C11918236 @default.
- W4386883102 hasConcept C119599485 @default.
- W4386883102 hasConcept C127162648 @default.
- W4386883102 hasConcept C127413603 @default.
- W4386883102 hasConcept C136525101 @default.
- W4386883102 hasConcept C142724271 @default.
- W4386883102 hasConcept C165801399 @default.
- W4386883102 hasConcept C171250308 @default.
- W4386883102 hasConcept C172385210 @default.
- W4386883102 hasConcept C185592680 @default.
- W4386883102 hasConcept C192562407 @default.
- W4386883102 hasConcept C204787440 @default.
- W4386883102 hasConcept C2778413303 @default.
- W4386883102 hasConcept C2779227376 @default.
- W4386883102 hasConcept C43617362 @default.
- W4386883102 hasConcept C49040817 @default.
- W4386883102 hasConcept C71924100 @default.
- W4386883102 hasConcept C8010536 @default.
- W4386883102 hasConcept C87359718 @default.
- W4386883102 hasConceptScore W4386883102C113196181 @default.
- W4386883102 hasConceptScore W4386883102C11918236 @default.
- W4386883102 hasConceptScore W4386883102C119599485 @default.
- W4386883102 hasConceptScore W4386883102C127162648 @default.
- W4386883102 hasConceptScore W4386883102C127413603 @default.
- W4386883102 hasConceptScore W4386883102C136525101 @default.
- W4386883102 hasConceptScore W4386883102C142724271 @default.
- W4386883102 hasConceptScore W4386883102C165801399 @default.
- W4386883102 hasConceptScore W4386883102C171250308 @default.
- W4386883102 hasConceptScore W4386883102C172385210 @default.
- W4386883102 hasConceptScore W4386883102C185592680 @default.
- W4386883102 hasConceptScore W4386883102C192562407 @default.
- W4386883102 hasConceptScore W4386883102C204787440 @default.
- W4386883102 hasConceptScore W4386883102C2778413303 @default.
- W4386883102 hasConceptScore W4386883102C2779227376 @default.
- W4386883102 hasConceptScore W4386883102C43617362 @default.
- W4386883102 hasConceptScore W4386883102C49040817 @default.
- W4386883102 hasConceptScore W4386883102C71924100 @default.
- W4386883102 hasConceptScore W4386883102C8010536 @default.
- W4386883102 hasConceptScore W4386883102C87359718 @default.
- W4386883102 hasLocation W43868831021 @default.
- W4386883102 hasOpenAccess W4386883102 @default.
- W4386883102 hasPrimaryLocation W43868831021 @default.
- W4386883102 hasRelatedWork W1632932706 @default.
- W4386883102 hasRelatedWork W1901938109 @default.
- W4386883102 hasRelatedWork W1976250511 @default.
- W4386883102 hasRelatedWork W2024558969 @default.
- W4386883102 hasRelatedWork W2062981985 @default.
- W4386883102 hasRelatedWork W2560202326 @default.
- W4386883102 hasRelatedWork W2974701713 @default.
- W4386883102 hasRelatedWork W4293221891 @default.
- W4386883102 hasRelatedWork W4293252748 @default.
- W4386883102 hasRelatedWork W980827467 @default.
- W4386883102 isParatext "false" @default.
- W4386883102 isRetracted "false" @default.
- W4386883102 workType "article" @default.