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- W4387249907 abstract "Silicon parts can contain micrometer-sized vertical cracks that are challenging to detect. Inspection using high-frequency focused ultrasound has shown promise for detecting defects of this size and geometry. However, implementing focused ultrasound to inspect anisotropic media can prove challenging, given the directional dependence of wave propagation and subsequent focusing behavior. In this work, back surface-breaking defects at various orientations within silicon wafers (0-, 15-, and 45-degrees relative to the [010] crystallographic axis) are experimentally inspected in an immersion tank setup. Using 100 MHz unfocused and focused shear waves, the impact of medium anisotropy on focusing and defect detection is evaluated. The scattering amplitude and defect detection sensitivity results demonstrate orientation-dependent patterns that strongly rely on the use of focused transducers. The defects along the 45-degree orientation reveal two-lobe scattering patterns with maximum amplitudes less than half that of the defects in the 0-degree orientation, which in contrast show a one-lobe scattering pattern. The experimental results are further explored using Finite Element (FE) modeling and ray tracing to visualize the impact of focusing on wave propagation within the silicon. Ray tracing results show that the focused beam profiles for the 45- and 0-degree orientations form a butterfly wing and elliptical focusing profile, respectively, which correspond directly to experimentally found scattering patterns from defects. Additionally, the FE scattering results from unfocused transducers reveal single lobe scattering for both 0- and 45-degree orientations, proving the varying scattering patterns to be driven by the anisotropic focusing behavior." @default.
- W4387249907 created "2023-10-03" @default.
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- W4387249907 date "2023-01-01" @default.
- W4387249907 modified "2023-10-17" @default.
- W4387249907 title "Shear Wave Ultrasound Inspection of Flaws in Silicon Wafers using Focused Transducers" @default.
- W4387249907 doi "https://doi.org/10.1109/tuffc.2023.3321254" @default.
- W4387249907 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/37782587" @default.
- W4387249907 hasPublicationYear "2023" @default.
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