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- W4387251184 abstract "Aluminium Nitride (AlN) as a piezoelectric material has certain advantages compared to PZT, like linearity, inherent polarity and the absence of lead as a potentially hazardous substance. Its weaker piezoelectric coefficient can partially be compensated by a higher driving voltage, as AlN usually has a high dielectric strength. Yet, while developing our quasistatic MEMS micro mirrors based on AlN, we frequently encountered dielectric breakdowns between 30V and 80 V, while expecting reliable operation up to 150 V. By means of lock-in thermography, we were able to localize hot spots at the border of the top electrode that would lead to breakdown events. A cumulation of such hot spots was examined by focused ion beam (FIB) slicing and we discovered AlN voids close to the border. An inspection of the Pt bottom electrode by SEM and dark field microscopy showed no significant defect density in this process stage. Our explanation for the failure is therefore a diffusion of ions into the AlN layer that would be mobilized by the electric field across the piezo layer and lead to heating and dielectric breakdown. To conclude the study, we plan further analysis by TEM and EDX." @default.
- W4387251184 created "2023-10-03" @default.
- W4387251184 creator A5039770980 @default.
- W4387251184 creator A5054786208 @default.
- W4387251184 creator A5090466929 @default.
- W4387251184 date "2023-05-28" @default.
- W4387251184 modified "2023-10-06" @default.
- W4387251184 title "Localization of Dielectric Failures in Aluminium Nitride MEMS Actuators Using Lock-in Thermography" @default.
- W4387251184 cites W2118146041 @default.
- W4387251184 cites W2920170413 @default.
- W4387251184 cites W856127373 @default.
- W4387251184 doi "https://doi.org/10.1109/dtip58682.2023.10267929" @default.
- W4387251184 hasPublicationYear "2023" @default.
- W4387251184 type Work @default.
- W4387251184 citedByCount "0" @default.
- W4387251184 crossrefType "proceedings-article" @default.
- W4387251184 hasAuthorship W4387251184A5039770980 @default.
- W4387251184 hasAuthorship W4387251184A5054786208 @default.
- W4387251184 hasAuthorship W4387251184A5090466929 @default.
- W4387251184 hasConcept C100082104 @default.
- W4387251184 hasConcept C120665830 @default.
- W4387251184 hasConcept C121332964 @default.
- W4387251184 hasConcept C133386390 @default.
- W4387251184 hasConcept C147789679 @default.
- W4387251184 hasConcept C158355884 @default.
- W4387251184 hasConcept C159985019 @default.
- W4387251184 hasConcept C17525397 @default.
- W4387251184 hasConcept C185592680 @default.
- W4387251184 hasConcept C192562407 @default.
- W4387251184 hasConcept C194760766 @default.
- W4387251184 hasConcept C2777431650 @default.
- W4387251184 hasConcept C2779222261 @default.
- W4387251184 hasConcept C2779227376 @default.
- W4387251184 hasConcept C2780162792 @default.
- W4387251184 hasConcept C2780243435 @default.
- W4387251184 hasConcept C37977207 @default.
- W4387251184 hasConcept C49040817 @default.
- W4387251184 hasConcept C513153333 @default.
- W4387251184 hasConcept C70401718 @default.
- W4387251184 hasConceptScore W4387251184C100082104 @default.
- W4387251184 hasConceptScore W4387251184C120665830 @default.
- W4387251184 hasConceptScore W4387251184C121332964 @default.
- W4387251184 hasConceptScore W4387251184C133386390 @default.
- W4387251184 hasConceptScore W4387251184C147789679 @default.
- W4387251184 hasConceptScore W4387251184C158355884 @default.
- W4387251184 hasConceptScore W4387251184C159985019 @default.
- W4387251184 hasConceptScore W4387251184C17525397 @default.
- W4387251184 hasConceptScore W4387251184C185592680 @default.
- W4387251184 hasConceptScore W4387251184C192562407 @default.
- W4387251184 hasConceptScore W4387251184C194760766 @default.
- W4387251184 hasConceptScore W4387251184C2777431650 @default.
- W4387251184 hasConceptScore W4387251184C2779222261 @default.
- W4387251184 hasConceptScore W4387251184C2779227376 @default.
- W4387251184 hasConceptScore W4387251184C2780162792 @default.
- W4387251184 hasConceptScore W4387251184C2780243435 @default.
- W4387251184 hasConceptScore W4387251184C37977207 @default.
- W4387251184 hasConceptScore W4387251184C49040817 @default.
- W4387251184 hasConceptScore W4387251184C513153333 @default.
- W4387251184 hasConceptScore W4387251184C70401718 @default.
- W4387251184 hasLocation W43872511841 @default.
- W4387251184 hasOpenAccess W4387251184 @default.
- W4387251184 hasPrimaryLocation W43872511841 @default.
- W4387251184 hasRelatedWork W174278852 @default.
- W4387251184 hasRelatedWork W2008280940 @default.
- W4387251184 hasRelatedWork W2016009248 @default.
- W4387251184 hasRelatedWork W2069527050 @default.
- W4387251184 hasRelatedWork W2368607384 @default.
- W4387251184 hasRelatedWork W2391588106 @default.
- W4387251184 hasRelatedWork W2401831878 @default.
- W4387251184 hasRelatedWork W2620662450 @default.
- W4387251184 hasRelatedWork W2894847042 @default.
- W4387251184 hasRelatedWork W612498122 @default.
- W4387251184 isParatext "false" @default.
- W4387251184 isRetracted "false" @default.
- W4387251184 workType "article" @default.