Matches in SemOpenAlex for { <https://semopenalex.org/work/W4387312366> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W4387312366 abstract "The surface figure of an x-ray mirror was improved by differential deposition of WSi<sub>2</sub> layers. DC magnetron sputtering through beam-defining apertures was applied on moving substrates to generate thin films with arbitrary longitudinal thickness variations. The required velocity profiles were calculated using a deconvolution algorithm. Height errors were evaluated after each correction iteration using off-line visible light surface metrology. WSi<sub>2</sub> was selected as a promising material since it conserves the initial substrate surface roughness and limits the film stress to acceptable levels. On a 300 mm long flat Si mirror the shape error was reduced to less than 0.2 nm RMS." @default.
- W4387312366 created "2023-10-04" @default.
- W4387312366 creator A5046738401 @default.
- W4387312366 creator A5066909870 @default.
- W4387312366 creator A5072024627 @default.
- W4387312366 creator A5078368075 @default.
- W4387312366 creator A5086448101 @default.
- W4387312366 date "2023-10-03" @default.
- W4387312366 modified "2023-10-18" @default.
- W4387312366 title "Surface figure correction using differential deposition of WSi2" @default.
- W4387312366 cites W1968525924 @default.
- W4387312366 cites W1969775590 @default.
- W4387312366 cites W1992717312 @default.
- W4387312366 cites W1998230841 @default.
- W4387312366 cites W2053631955 @default.
- W4387312366 cites W2086529087 @default.
- W4387312366 cites W2558579027 @default.
- W4387312366 cites W2901731977 @default.
- W4387312366 cites W2980072541 @default.
- W4387312366 cites W3011568777 @default.
- W4387312366 cites W3132325153 @default.
- W4387312366 cites W4242398860 @default.
- W4387312366 cites W4378782961 @default.
- W4387312366 doi "https://doi.org/10.1117/12.2676633" @default.
- W4387312366 hasPublicationYear "2023" @default.
- W4387312366 type Work @default.
- W4387312366 citedByCount "0" @default.
- W4387312366 crossrefType "proceedings-article" @default.
- W4387312366 hasAuthorship W4387312366A5046738401 @default.
- W4387312366 hasAuthorship W4387312366A5066909870 @default.
- W4387312366 hasAuthorship W4387312366A5072024627 @default.
- W4387312366 hasAuthorship W4387312366A5078368075 @default.
- W4387312366 hasAuthorship W4387312366A5086448101 @default.
- W4387312366 hasConcept C107365816 @default.
- W4387312366 hasConcept C111368507 @default.
- W4387312366 hasConcept C120665830 @default.
- W4387312366 hasConcept C121332964 @default.
- W4387312366 hasConcept C127313418 @default.
- W4387312366 hasConcept C151730666 @default.
- W4387312366 hasConcept C159985019 @default.
- W4387312366 hasConcept C171250308 @default.
- W4387312366 hasConcept C174576160 @default.
- W4387312366 hasConcept C19067145 @default.
- W4387312366 hasConcept C192562407 @default.
- W4387312366 hasConcept C195766429 @default.
- W4387312366 hasConcept C22423302 @default.
- W4387312366 hasConcept C2524010 @default.
- W4387312366 hasConcept C2776799497 @default.
- W4387312366 hasConcept C2777289219 @default.
- W4387312366 hasConcept C2816523 @default.
- W4387312366 hasConcept C33923547 @default.
- W4387312366 hasConcept C61427134 @default.
- W4387312366 hasConcept C64297162 @default.
- W4387312366 hasConcept C71039073 @default.
- W4387312366 hasConcept C86803240 @default.
- W4387312366 hasConcept C93226319 @default.
- W4387312366 hasConcept C97355855 @default.
- W4387312366 hasConceptScore W4387312366C107365816 @default.
- W4387312366 hasConceptScore W4387312366C111368507 @default.
- W4387312366 hasConceptScore W4387312366C120665830 @default.
- W4387312366 hasConceptScore W4387312366C121332964 @default.
- W4387312366 hasConceptScore W4387312366C127313418 @default.
- W4387312366 hasConceptScore W4387312366C151730666 @default.
- W4387312366 hasConceptScore W4387312366C159985019 @default.
- W4387312366 hasConceptScore W4387312366C171250308 @default.
- W4387312366 hasConceptScore W4387312366C174576160 @default.
- W4387312366 hasConceptScore W4387312366C19067145 @default.
- W4387312366 hasConceptScore W4387312366C192562407 @default.
- W4387312366 hasConceptScore W4387312366C195766429 @default.
- W4387312366 hasConceptScore W4387312366C22423302 @default.
- W4387312366 hasConceptScore W4387312366C2524010 @default.
- W4387312366 hasConceptScore W4387312366C2776799497 @default.
- W4387312366 hasConceptScore W4387312366C2777289219 @default.
- W4387312366 hasConceptScore W4387312366C2816523 @default.
- W4387312366 hasConceptScore W4387312366C33923547 @default.
- W4387312366 hasConceptScore W4387312366C61427134 @default.
- W4387312366 hasConceptScore W4387312366C64297162 @default.
- W4387312366 hasConceptScore W4387312366C71039073 @default.
- W4387312366 hasConceptScore W4387312366C86803240 @default.
- W4387312366 hasConceptScore W4387312366C93226319 @default.
- W4387312366 hasConceptScore W4387312366C97355855 @default.
- W4387312366 hasLocation W43873123661 @default.
- W4387312366 hasOpenAccess W4387312366 @default.
- W4387312366 hasPrimaryLocation W43873123661 @default.
- W4387312366 hasRelatedWork W1967383351 @default.
- W4387312366 hasRelatedWork W1998546186 @default.
- W4387312366 hasRelatedWork W2032074591 @default.
- W4387312366 hasRelatedWork W2037261263 @default.
- W4387312366 hasRelatedWork W3090782779 @default.
- W4387312366 hasRelatedWork W3149087629 @default.
- W4387312366 hasRelatedWork W3193619106 @default.
- W4387312366 hasRelatedWork W4231036715 @default.
- W4387312366 hasRelatedWork W4296701479 @default.
- W4387312366 hasRelatedWork W850150341 @default.
- W4387312366 isParatext "false" @default.
- W4387312366 isRetracted "false" @default.
- W4387312366 workType "article" @default.