FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4387443313> ?p ?o ?g. }

• W4387443313 endingPage "107893" @default.
• W4387443313 startingPage "107893" @default.
• W4387443313 abstract "We have systematically quantified, for a fixed Ge2H6 flow, the impact of temperature, pressure, H2 carrier flow and SnCl4 flow on the GeSn growth kinetics in Reduced Pressure – Chemical Vapor Deposition (RP-CVD). We have shown that the growth temperature T was the main lever that should be actioned in order to change the Sn concentration, with, at 100 Torr, a −1.55 %/10 °C decrease as T increased over the 301 °C–362 °C range. We had, as expected, an exponential increase of the GeSn growth rate with T, with very similar activation energies between 11.0 and 11.6 kcal mol.−1 whatever the SnCl4 flow. Changing, at a given temperature, the SnCl4 flow resulted in a Sn concentration increase of, on average, 2.6 % only for a factor of three increase of the SnCl4 flow. Growth rates, which linearly increased with the SnCl4 flows, were however rather small for small SnCl4 flows, which would be a hindrance for thick stacks. We had, at 100 Torr, a slight Sn concentration increase when halving the reference H2 flow, but the gain was limited (on average, +1.36 % over the 313 °C–362 °C range) and the spatial uniformity degraded. A halving of the growth pressure from 100 down to 50 Torr otherwise resulted in Sn concentrations that were barely lower (-0.65 % only, on average). Finally, layers grown in the 301°C–349 °C range were cross-hatched and of high crystalline quality, while 362 °C layers were islanded, all the more so for low SnCl4 flows." @default.
• W4387443313 created "2023-10-10" @default.
• W4387443313 creator A5010132189 @default.
• W4387443313 creator A5013032665 @default.
• W4387443313 date "2024-01-01" @default.
• W4387443313 modified "2023-10-16" @default.
• W4387443313 title "Impact of flows, temperature and pressure on the GeSn growth kinetics with a digermane and tin tetrachloride chemistry" @default.
• W4387443313 cites W1504494732 @default.
• W4387443313 cites W2026253601 @default.
• W4387443313 cites W2051873877 @default.
• W4387443313 cites W2166541870 @default.
• W4387443313 cites W2767825980 @default.
• W4387443313 cites W2789623996 @default.
• W4387443313 cites W2890677379 @default.
• W4387443313 cites W2896648871 @default.
• W4387443313 cites W2897604055 @default.
• W4387443313 cites W2912744840 @default.
• W4387443313 cites W2937040124 @default.
• W4387443313 cites W3009654227 @default.
• W4387443313 cites W3038042461 @default.
• W4387443313 cites W3041856250 @default.
• W4387443313 cites W3088742205 @default.
• W4387443313 cites W3089143163 @default.
• W4387443313 cites W3209626003 @default.
• W4387443313 cites W4214483627 @default.
• W4387443313 cites W4283380816 @default.
• W4387443313 cites W4313321155 @default.
• W4387443313 cites W4362580331 @default.
• W4387443313 doi "https://doi.org/10.1016/j.mssp.2023.107893" @default.
• W4387443313 hasPublicationYear "2024" @default.
• W4387443313 type Work @default.
• W4387443313 citedByCount "0" @default.
• W4387443313 crossrefType "journal-article" @default.
• W4387443313 hasAuthorship W4387443313A5010132189 @default.
• W4387443313 hasAuthorship W4387443313A5013032665 @default.
• W4387443313 hasConcept C113196181 @default.
• W4387443313 hasConcept C121332964 @default.
• W4387443313 hasConcept C148898269 @default.
• W4387443313 hasConcept C151730666 @default.
• W4387443313 hasConcept C171250308 @default.
• W4387443313 hasConcept C172120300 @default.
• W4387443313 hasConcept C185592680 @default.
• W4387443313 hasConcept C191897082 @default.
• W4387443313 hasConcept C192562407 @default.
• W4387443313 hasConcept C2524010 @default.
• W4387443313 hasConcept C2778312390 @default.
• W4387443313 hasConcept C2816523 @default.
• W4387443313 hasConcept C30646810 @default.
• W4387443313 hasConcept C33923547 @default.
• W4387443313 hasConcept C38349280 @default.
• W4387443313 hasConcept C39353612 @default.
• W4387443313 hasConcept C43617362 @default.
• W4387443313 hasConcept C525849907 @default.
• W4387443313 hasConcept C57410435 @default.
• W4387443313 hasConcept C57879066 @default.
• W4387443313 hasConcept C62520636 @default.
• W4387443313 hasConcept C64297162 @default.
• W4387443313 hasConcept C86803240 @default.
• W4387443313 hasConcept C97355855 @default.
• W4387443313 hasConceptScore W4387443313C113196181 @default.
• W4387443313 hasConceptScore W4387443313C121332964 @default.
• W4387443313 hasConceptScore W4387443313C148898269 @default.
• W4387443313 hasConceptScore W4387443313C151730666 @default.
• W4387443313 hasConceptScore W4387443313C171250308 @default.
• W4387443313 hasConceptScore W4387443313C172120300 @default.
• W4387443313 hasConceptScore W4387443313C185592680 @default.
• W4387443313 hasConceptScore W4387443313C191897082 @default.
• W4387443313 hasConceptScore W4387443313C192562407 @default.
• W4387443313 hasConceptScore W4387443313C2524010 @default.
• W4387443313 hasConceptScore W4387443313C2778312390 @default.
• W4387443313 hasConceptScore W4387443313C2816523 @default.
• W4387443313 hasConceptScore W4387443313C30646810 @default.
• W4387443313 hasConceptScore W4387443313C33923547 @default.
• W4387443313 hasConceptScore W4387443313C38349280 @default.
• W4387443313 hasConceptScore W4387443313C39353612 @default.
• W4387443313 hasConceptScore W4387443313C43617362 @default.
• W4387443313 hasConceptScore W4387443313C525849907 @default.
• W4387443313 hasConceptScore W4387443313C57410435 @default.
• W4387443313 hasConceptScore W4387443313C57879066 @default.
• W4387443313 hasConceptScore W4387443313C62520636 @default.
• W4387443313 hasConceptScore W4387443313C64297162 @default.
• W4387443313 hasConceptScore W4387443313C86803240 @default.
• W4387443313 hasConceptScore W4387443313C97355855 @default.
• W4387443313 hasLocation W43874433131 @default.
• W4387443313 hasOpenAccess W4387443313 @default.
• W4387443313 hasPrimaryLocation W43874433131 @default.
• W4387443313 hasRelatedWork W1148372108 @default.
• W4387443313 hasRelatedWork W1483162499 @default.
• W4387443313 hasRelatedWork W1976600037 @default.
• W4387443313 hasRelatedWork W2040310861 @default.
• W4387443313 hasRelatedWork W2273391071 @default.
• W4387443313 hasRelatedWork W2300266636 @default.
• W4387443313 hasRelatedWork W2312192749 @default.
• W4387443313 hasRelatedWork W2332218522 @default.
• W4387443313 hasRelatedWork W2492470561 @default.
• W4387443313 hasRelatedWork W4244232650 @default.
• W4387443313 hasVolume "169" @default.
• W4387443313 isParatext "false" @default.

• next