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- W4387446593 abstract "In this paper, we investigate the impact of asymmetric piezoelectricity of the 100nm Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.7</inf> Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.3</inf> N film on the mode-switchable film bulk acoustic resonator (FBAR), which composes of two stacked ferroelectrically switchable Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.7</inf> Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.3</inf> N layers. A high overtone bulk acoustic wave mode test structure is designed and fabricated to extract the piezoelectric properties of the 100nm Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.7</inf> Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.3</inf> N film at positive and negative polarization states. It is found that the film exhibits different electromechanical coupling constant $(K_{text{t}}^2)$ of 11.8% and 7.9% at different polarities. The theoretical model built upon the extracted material parameters suggests that two resonant frequencies at around 10GHz and 18.5GHz can be obtained in a FBAR with stacked 100nm Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.7</inf> Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.3</inf> N dual films in between 50nm Mo electrodes. The effective coupling coefficient ($K_{{rm{eff}}}^2$) can be tuned between 19.7% and 12.7% at the 10GHz mode by aligning both Al0.7Sc0.3N films at positive or negative polarization, respectively. While switching to make the two films at opposite polarities will boost the frequency to be 18.5GHz with $K_{{rm{eff}}}^2$ of 18%." @default.
- W4387446593 created "2023-10-10" @default.
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- W4387446593 date "2023-05-15" @default.
- W4387446593 modified "2023-10-11" @default.
- W4387446593 title "Impact of Asymmetric Piezoelectricity of 100 nm Al<sub>0.7</sub>Sc<sub>0.3</sub>N Thin Film on Ferroelectrically Switchable Multi-Layer Bulk Acoustic Wave Resonators" @default.
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- W4387446593 doi "https://doi.org/10.1109/eftf/ifcs57587.2023.10272182" @default.
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