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- W4387448001 abstract "A piezoelectric single-crystal accelerometer with a novel tri-beam structure (TBRA) is developed, and a dual-objective optimization algorithm based on the gradient method (DOA/G) is proposed to improve the performance of TBRA. Both sensitivity and resonant frequency can be enhanced simultaneously from a global perspective by using DOA/G, and the optimized sensitivity and resonant frequency are increased by 50.7% and 31.9% respectively compared with the inertial parameters. The TBRA prototype has been fabricated and characterized. The obtained voltage sensitivity is 6.12 mV/ms <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-2</sup> and the resonant frequency is 3890Hz, which consistent with the simulations. Measurements of the device’s performance demonstrate a noise level of 27ng/√ <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Hz</i> at 200Hz, and a dynamic range exceeding 140dB. In addition, the proposed optimization approach provides a new idea for improving the overall performance of the other similar sensors, such as hydrophones, energy harvesters and vibration sensors." @default.
- W4387448001 created "2023-10-10" @default.
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- W4387448001 date "2023-01-01" @default.
- W4387448001 modified "2023-10-11" @default.
- W4387448001 title "Development of a high-performance piezoelectric single-crystal accelerometer by using gradient optimization method" @default.
- W4387448001 doi "https://doi.org/10.1109/jsen.2023.3318973" @default.
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