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- W4387476827 abstract "Anyhow, basically starting out with the first slide, what I’m trying to show here is that essentially the KLA system, the Klara systems can be easier subdivided into three main systems. One is the data base conversion, that converts other formats into the KLA format. The second, being what they call the RIA (Reticle Inspection Adapter) that converts the KLA format into a bit map representation and sends that to the 201 and the third being the 201 or inspection station that scans the plate under the optics and projects that onto a photo diode array and from there digitizes that and compares that to the data from the RIA." @default.
- W4387476827 created "2023-10-11" @default.
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- W4387476827 date "2023-10-11" @default.
- W4387476827 modified "2023-10-16" @default.
- W4387476827 title "The conversion of data to Klaris format" @default.
- W4387476827 doi "https://doi.org/10.1117/12.3011320" @default.
- W4387476827 hasPublicationYear "2023" @default.
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