Matches in SemOpenAlex for { <https://semopenalex.org/work/W4387477851> ?p ?o ?g. }
Showing items 1 to 56 of
56
with 100 items per page.
- W4387477851 abstract "You recall that earlier this morning Reed Welsh mentioned that, with the tolerances that we’re experiencing today in our product, any kind of a difference between measurement standards is important. To go ahead and document our study to this group, we used the Nikon NPA’s that were in our mask lab. As you know you can use any kind of a standard to calibrate the machines. We used the Roger Sherman standard originally, and we went to use the NBS standard for this one customer. As you also might be aware, a line width measure to Roger Sherman three remeasured at NBS will give you two different values. We had two NBS standards in our lab and that they both tracked each other very well. So I’m just going to group those two together for this presentation." @default.
- W4387477851 created "2023-10-11" @default.
- W4387477851 creator A5011276148 @default.
- W4387477851 date "2023-10-11" @default.
- W4387477851 modified "2023-10-16" @default.
- W4387477851 title "Critical dimension standard correlations" @default.
- W4387477851 doi "https://doi.org/10.1117/12.3011331" @default.
- W4387477851 hasPublicationYear "2023" @default.
- W4387477851 type Work @default.
- W4387477851 citedByCount "0" @default.
- W4387477851 crossrefType "proceedings-article" @default.
- W4387477851 hasAuthorship W4387477851A5011276148 @default.
- W4387477851 hasConcept C105795698 @default.
- W4387477851 hasConcept C114614502 @default.
- W4387477851 hasConcept C126838900 @default.
- W4387477851 hasConcept C138885662 @default.
- W4387477851 hasConcept C22679943 @default.
- W4387477851 hasConcept C2524010 @default.
- W4387477851 hasConcept C2777601897 @default.
- W4387477851 hasConcept C2780769345 @default.
- W4387477851 hasConcept C33676613 @default.
- W4387477851 hasConcept C33923547 @default.
- W4387477851 hasConcept C41008148 @default.
- W4387477851 hasConcept C41895202 @default.
- W4387477851 hasConcept C71924100 @default.
- W4387477851 hasConcept C90673727 @default.
- W4387477851 hasConceptScore W4387477851C105795698 @default.
- W4387477851 hasConceptScore W4387477851C114614502 @default.
- W4387477851 hasConceptScore W4387477851C126838900 @default.
- W4387477851 hasConceptScore W4387477851C138885662 @default.
- W4387477851 hasConceptScore W4387477851C22679943 @default.
- W4387477851 hasConceptScore W4387477851C2524010 @default.
- W4387477851 hasConceptScore W4387477851C2777601897 @default.
- W4387477851 hasConceptScore W4387477851C2780769345 @default.
- W4387477851 hasConceptScore W4387477851C33676613 @default.
- W4387477851 hasConceptScore W4387477851C33923547 @default.
- W4387477851 hasConceptScore W4387477851C41008148 @default.
- W4387477851 hasConceptScore W4387477851C41895202 @default.
- W4387477851 hasConceptScore W4387477851C71924100 @default.
- W4387477851 hasConceptScore W4387477851C90673727 @default.
- W4387477851 hasLocation W43874778511 @default.
- W4387477851 hasOpenAccess W4387477851 @default.
- W4387477851 hasPrimaryLocation W43874778511 @default.
- W4387477851 hasRelatedWork W1978829741 @default.
- W4387477851 hasRelatedWork W2033715934 @default.
- W4387477851 hasRelatedWork W2040783354 @default.
- W4387477851 hasRelatedWork W2052674586 @default.
- W4387477851 hasRelatedWork W2510268336 @default.
- W4387477851 hasRelatedWork W2512662776 @default.
- W4387477851 hasRelatedWork W4241112534 @default.
- W4387477851 hasRelatedWork W4248072080 @default.
- W4387477851 hasRelatedWork W4283319997 @default.
- W4387477851 hasRelatedWork W642427038 @default.
- W4387477851 isParatext "false" @default.
- W4387477851 isRetracted "false" @default.
- W4387477851 workType "article" @default.