Matches in SemOpenAlex for { <https://semopenalex.org/work/W4387490660> ?p ?o ?g. }
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- W4387490660 endingPage "196" @default.
- W4387490660 startingPage "188" @default.
- W4387490660 abstract "By the latest method, wafers of semiconductors have been sliced very thin for manufacturing efficiency, and the manufacturing process of stacking various thin films has been used. In order to measure such a thin film during the semiconductor manufacturing process, an Elipsometer, a non-destructive optical device, is used. Ellipsometer analyzes the thin film by checking the change in the polarization state of the incident light after the light irradiated to the wafer surface is reflected from the incident surface. However, thinly sliced wafers are often bent during the manufacturing process, so in industrial sites Therefore, it was difficult to efficiently measure the thin film by maintaining an accurate optical state. Accordingly, this study analyzed data based on the image of Machine Vision and compared algorithms that efficiently enable precise measurement on vented wafers by using it and changing the Z axis. Thus, we propose a focusing optimizing algorithm based on machine vision image processing and evaluate the data and features to support it, and we open data sets and algorithm codes that can prove this process in GitHub repository1. In addition, the efficiency of these algorithms was interpreted through simulation figures, and through this, an optical system capable of precise measurement applying a method of efficiently moving the Z-axis is proposed." @default.
- W4387490660 created "2023-10-11" @default.
- W4387490660 creator A5029854402 @default.
- W4387490660 creator A5031383405 @default.
- W4387490660 creator A5032395805 @default.
- W4387490660 creator A5058457710 @default.
- W4387490660 creator A5061030253 @default.
- W4387490660 creator A5072696954 @default.
- W4387490660 date "2023-01-01" @default.
- W4387490660 modified "2023-10-16" @default.
- W4387490660 title "Optimal Z-axis Find Algorithm in Ellipsometry Semiconductor Process based on Local Search using Machine Vision" @default.
- W4387490660 cites W2021927305 @default.
- W4387490660 cites W2054092027 @default.
- W4387490660 cites W2067469524 @default.
- W4387490660 cites W2121928248 @default.
- W4387490660 cites W4225476092 @default.
- W4387490660 cites W4229075579 @default.
- W4387490660 doi "https://doi.org/10.1016/j.procs.2023.09.027" @default.
- W4387490660 hasPublicationYear "2023" @default.
- W4387490660 type Work @default.
- W4387490660 citedByCount "0" @default.
- W4387490660 crossrefType "journal-article" @default.
- W4387490660 hasAuthorship W4387490660A5029854402 @default.
- W4387490660 hasAuthorship W4387490660A5031383405 @default.
- W4387490660 hasAuthorship W4387490660A5032395805 @default.
- W4387490660 hasAuthorship W4387490660A5058457710 @default.
- W4387490660 hasAuthorship W4387490660A5061030253 @default.
- W4387490660 hasAuthorship W4387490660A5072696954 @default.
- W4387490660 hasBestOaLocation W43874906601 @default.
- W4387490660 hasConcept C108225325 @default.
- W4387490660 hasConcept C111919701 @default.
- W4387490660 hasConcept C11413529 @default.
- W4387490660 hasConcept C120665830 @default.
- W4387490660 hasConcept C121332964 @default.
- W4387490660 hasConcept C160671074 @default.
- W4387490660 hasConcept C171250308 @default.
- W4387490660 hasConcept C18293161 @default.
- W4387490660 hasConcept C19067145 @default.
- W4387490660 hasConcept C192562407 @default.
- W4387490660 hasConcept C195766429 @default.
- W4387490660 hasConcept C31972630 @default.
- W4387490660 hasConcept C33347731 @default.
- W4387490660 hasConcept C41008148 @default.
- W4387490660 hasConcept C46141821 @default.
- W4387490660 hasConcept C49040817 @default.
- W4387490660 hasConcept C5339829 @default.
- W4387490660 hasConcept C66018809 @default.
- W4387490660 hasConcept C98045186 @default.
- W4387490660 hasConceptScore W4387490660C108225325 @default.
- W4387490660 hasConceptScore W4387490660C111919701 @default.
- W4387490660 hasConceptScore W4387490660C11413529 @default.
- W4387490660 hasConceptScore W4387490660C120665830 @default.
- W4387490660 hasConceptScore W4387490660C121332964 @default.
- W4387490660 hasConceptScore W4387490660C160671074 @default.
- W4387490660 hasConceptScore W4387490660C171250308 @default.
- W4387490660 hasConceptScore W4387490660C18293161 @default.
- W4387490660 hasConceptScore W4387490660C19067145 @default.
- W4387490660 hasConceptScore W4387490660C192562407 @default.
- W4387490660 hasConceptScore W4387490660C195766429 @default.
- W4387490660 hasConceptScore W4387490660C31972630 @default.
- W4387490660 hasConceptScore W4387490660C33347731 @default.
- W4387490660 hasConceptScore W4387490660C41008148 @default.
- W4387490660 hasConceptScore W4387490660C46141821 @default.
- W4387490660 hasConceptScore W4387490660C49040817 @default.
- W4387490660 hasConceptScore W4387490660C5339829 @default.
- W4387490660 hasConceptScore W4387490660C66018809 @default.
- W4387490660 hasConceptScore W4387490660C98045186 @default.
- W4387490660 hasLocation W43874906601 @default.
- W4387490660 hasOpenAccess W4387490660 @default.
- W4387490660 hasPrimaryLocation W43874906601 @default.
- W4387490660 hasRelatedWork W1876981296 @default.
- W4387490660 hasRelatedWork W1980441280 @default.
- W4387490660 hasRelatedWork W2035329725 @default.
- W4387490660 hasRelatedWork W2060880752 @default.
- W4387490660 hasRelatedWork W2115540908 @default.
- W4387490660 hasRelatedWork W2151505334 @default.
- W4387490660 hasRelatedWork W2507812949 @default.
- W4387490660 hasRelatedWork W2600422794 @default.
- W4387490660 hasRelatedWork W3212607194 @default.
- W4387490660 hasRelatedWork W4376641153 @default.
- W4387490660 hasVolume "224" @default.
- W4387490660 isParatext "false" @default.
- W4387490660 isRetracted "false" @default.
- W4387490660 workType "article" @default.