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- W4387582331 abstract "The PTB has initiated a project to establish a length comparator for two-dimensional long-distance calibration of photomask standards. The new LMS 2000 mask measuring machine of the Ernst Leitz Wetzlar GmbH has been installed for this purpose. The aim is to calibrate mask standards absolutely, i.e. in terms of meter units, in a range of 200 mm x 200 mm with an uncertainty of about 20 nm x 20 nm. It is intended to develop methods for the on-line correction of errors which are due to machine characteristics, laser interferometer parameters, temperature variations and dimensioned properties of the mask. The fundamental metrological problems encountered in high-precision length calibration in one and two dimensions are presented. A short report on the state of our work and an outlook on future steps will be given." @default.
- W4387582331 created "2023-10-13" @default.
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- W4387582331 date "2023-10-13" @default.
- W4387582331 modified "2023-10-14" @default.
- W4387582331 title "PTB activities for the calibration of two-dimensional length standards for microlithography" @default.
- W4387582331 doi "https://doi.org/10.1117/12.3011936" @default.
- W4387582331 hasPublicationYear "2023" @default.
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