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- W4387588285 abstract "With the rapid development in the field of precision engineering, the demand for large range multi-degrees-of-freedom (DOF) micropositioning stage has been increased recently. To solve the problems of small motion range, local stress concentration and low motion accuracy caused by parasitic motion of the traditional flexure hinge in the multi-DOF micropositioning stage, a kind of large range beam-based flexure spherical hinge (BFSH) is firstly proposed in this paper. Meanwhile, based on the proposed BFSH, a large range 3-DOF $${theta _X}$$ $${theta _Y}$$ Z spatial micropositioning stage driven by voice coil motor (VCM) is designed by means of parallel branch chains and fully symmetric layout, which realizes the motion decoupling theoretically in structural design. Then, the kinematic equations of the moving platform are derived by geometric method. Finally, finite element analysis (FEA) is carried out to verify the static and dynamic performances of the designed 3-DOF stage. The results show that the stage can achieve a desired large workspace of ±24.6 mrad $$times $$ ±24.6 mrad $$times $$ ±3.50 mm and the good decoupling." @default.
- W4387588285 created "2023-10-13" @default.
- W4387588285 creator A5042707127 @default.
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- W4387588285 date "2023-01-01" @default.
- W4387588285 modified "2023-10-14" @default.
- W4387588285 title "Design of a Voice Coil Motor-Driven Multi-DOF Parallel Micropositioning Stage" @default.
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- W4387588285 doi "https://doi.org/10.1007/978-981-99-6504-5_11" @default.
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