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- W4387600617 abstract "Cutting of transparent materials is of great importance. In this study, JGS3 quartz glass is cut with laser stealth dicing (LSD) method. By loading computer generated hologram (CGH), a spatial light modulator (SLM) modulates a laser beam into ten coaxial beams along the depth direction. A human-in-the-loop feedback-weighted three-dimensional Gerchberg-Saxton (3D-GS) algorithm is utilized to improve its performance. The effectiveness of the algorithm is verified by CCD-captured energy distribution records. A noticeable improvement in multi-beam energy uniformity is realized. Additionally, an qualitative analysis is conducted to investigate the changes of laser beams inside the glass during LSD. Through flexible tuning of multi-focus spacing, the laser-diced surface roughness could be adjusted and optimized to ∼1 μm, paving the way for future advanced applications." @default.
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- W4387600617 date "2024-03-01" @default.
- W4387600617 modified "2023-10-14" @default.
- W4387600617 title "Flexible tuned, multi-focus laser stealth dicing of JGS3 quartz glass: From algorithm to practice" @default.
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- W4387600617 doi "https://doi.org/10.1016/j.optlastec.2023.110164" @default.
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