Matches in SemOpenAlex for { <https://semopenalex.org/work/W4387673995> ?p ?o ?g. }
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- W4387673995 endingPage "207" @default.
- W4387673995 startingPage "181" @default.
- W4387673995 abstract "This chapter examines in detail the key material processing technologies used to fabricate semiconductor devices. All semiconductor materials are man made (metamaterials) since naturally occurring elements are either dielectrics|insulators|conductors. To convert these dielectric|insulator materials into a form such that they can conduct electricity under appropriate operating conditions, the initial insulator material must be processed in appropriate ways. Most of these material processing techniques work only under high vacuum conditions. The discussion starts with how to create ultra high vacuum conditions." @default.
- W4387673995 created "2023-10-17" @default.
- W4387673995 creator A5015124516 @default.
- W4387673995 date "2023-10-17" @default.
- W4387673995 modified "2023-10-17" @default.
- W4387673995 title "Semiconductor Device Manufacturing Technologies" @default.
- W4387673995 doi "https://doi.org/10.1007/978-3-031-45750-0_11" @default.
- W4387673995 hasPublicationYear "2023" @default.
- W4387673995 type Work @default.
- W4387673995 citedByCount "0" @default.
- W4387673995 crossrefType "book-chapter" @default.
- W4387673995 hasAuthorship W4387673995A5015124516 @default.
- W4387673995 hasConcept C108225325 @default.
- W4387673995 hasConcept C110367647 @default.
- W4387673995 hasConcept C119599485 @default.
- W4387673995 hasConcept C127413603 @default.
- W4387673995 hasConcept C133386390 @default.
- W4387673995 hasConcept C160671074 @default.
- W4387673995 hasConcept C171250308 @default.
- W4387673995 hasConcept C192562407 @default.
- W4387673995 hasConcept C202374169 @default.
- W4387673995 hasConcept C206658404 @default.
- W4387673995 hasConcept C212702 @default.
- W4387673995 hasConcept C2779227376 @default.
- W4387673995 hasConcept C2989315489 @default.
- W4387673995 hasConcept C49040817 @default.
- W4387673995 hasConcept C61696701 @default.
- W4387673995 hasConcept C66018809 @default.
- W4387673995 hasConcept C78519656 @default.
- W4387673995 hasConcept C79635011 @default.
- W4387673995 hasConceptScore W4387673995C108225325 @default.
- W4387673995 hasConceptScore W4387673995C110367647 @default.
- W4387673995 hasConceptScore W4387673995C119599485 @default.
- W4387673995 hasConceptScore W4387673995C127413603 @default.
- W4387673995 hasConceptScore W4387673995C133386390 @default.
- W4387673995 hasConceptScore W4387673995C160671074 @default.
- W4387673995 hasConceptScore W4387673995C171250308 @default.
- W4387673995 hasConceptScore W4387673995C192562407 @default.
- W4387673995 hasConceptScore W4387673995C202374169 @default.
- W4387673995 hasConceptScore W4387673995C206658404 @default.
- W4387673995 hasConceptScore W4387673995C212702 @default.
- W4387673995 hasConceptScore W4387673995C2779227376 @default.
- W4387673995 hasConceptScore W4387673995C2989315489 @default.
- W4387673995 hasConceptScore W4387673995C49040817 @default.
- W4387673995 hasConceptScore W4387673995C61696701 @default.
- W4387673995 hasConceptScore W4387673995C66018809 @default.
- W4387673995 hasConceptScore W4387673995C78519656 @default.
- W4387673995 hasConceptScore W4387673995C79635011 @default.
- W4387673995 hasLocation W43876739951 @default.
- W4387673995 hasOpenAccess W4387673995 @default.
- W4387673995 hasPrimaryLocation W43876739951 @default.
- W4387673995 hasRelatedWork W1994668829 @default.
- W4387673995 hasRelatedWork W2024881010 @default.
- W4387673995 hasRelatedWork W2076793958 @default.
- W4387673995 hasRelatedWork W2113837294 @default.
- W4387673995 hasRelatedWork W2167114072 @default.
- W4387673995 hasRelatedWork W2359225346 @default.
- W4387673995 hasRelatedWork W301099122 @default.
- W4387673995 hasRelatedWork W37298765 @default.
- W4387673995 hasRelatedWork W4308929875 @default.
- W4387673995 hasRelatedWork W2134515992 @default.
- W4387673995 isParatext "false" @default.
- W4387673995 isRetracted "false" @default.
- W4387673995 workType "book-chapter" @default.